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Component Category
Helium Leak Detection
Helium Leak Detectors
Pumps
Dry Pumps
Small Dry Pumps
Mechanical Booster Pumps
Rotary Vane Pumps
Rotary Piston Pumps
Oil Diffusion Pumps
Film Measurement
Quartz Crystal Monitor
Spectroscopic Ellipsometry
Copper Film Measurement System
Gauges
Extremely High Vacuum Gauges
Ionization Gauges
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Gauge Displays
Capacitance Manometers
Residual Gas Analyzers
Residual Gas Analyzers
Systems
Plasma Ashing
Enviro
Luminous NA
Etching
Multifilm
Deep Oxide Etching
RISE System
PVD
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Overview
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Speciality Materials
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International Service
Supporting a broad range of industries requiring Materials and Services for next-generation product production
About ULVAC
Overview
News & Events
Environmental
International Offices
Investors
Social Responsibility
Careers
Quality Statement
Vacuum Magazine
Supporting a broad range of industries requiring Materials and Services for next-generation product production
Contact
Support
Overview
Resource Library
Request a Quote
RMA Request Form
EUD Request Form
Demo Request
Service Request
Safety Data Sheets
Technical Support Request
Pumps
Helium Leak Detection
Pumps
Dry Pumps
Small Dry Pumps
Mechanical Booster Pumps
Rotary Vane Pumps
Rotary Piston Pumps
Oil Diffusion Pumps
Film Measurement
Gauges
Residual Gas Analyzers
Sensor and Gauge Heads
Share
LS Series
Brand-New Screw-type Pump from ULVAC
View Details and Specs
CR Series
Compact, Air-cooled Dry Pump
View Details and Specs
LR/HR/UR Series
Roots pumps built to withstand your harshest processes.
View Details and Specs
Eco-Shock Power Saving Attachment
Reduce your power consumption up to 50%
View Details and Specs
DTC Series
Our corrosion resistant small pumping solution for your lab.
View Details and Specs
DAP Series
6 - 18 L/min dry pump for your smallest needs
View Details and Specs
DAU/DTU Series
High Vacuum Diaphram-type Vacuum Pump
View Details and Specs
DOP Series
Rocking Piston-Type Small Dry Pump
View Details and Specs
DIS Series
Double-Wrapping Scroll-type Dry Vacuum Pump
View Details and Specs
DA Series
Broad range of options from 20 L/m --> 260 L/m
View Details and Specs
DISL Series
Single Wrapping Scroll-type Dry Vacuum Pump
View Details and Specs
PRC Series
Large volume mechanical booster pump for clean room applications
View Details and Specs
PMB-D Series
Broad use mechanical booster pump for industrial application
View Details and Specs
PMB-C Series
Ideal for your large chamber application
View Details and Specs
MBS Series
Compact Booster Pump with Magnetically Coupled Motor
View Details and Specs
GHD Series
Magnetically-coupled motor to guarantee no leaks. Ever.
View Details and Specs
GLD Series
Reliable, High Performance Direct Drive Rotary Vane Pump
View Details and Specs
GCD Series
Corrosion resistant small rotary pump
View Details and Specs
VS 650A/750A Single Stage
Robust, install-anywhere, industrial vacuum solution.
View Details and Specs
VS Series
Low vibration, industrial pumping solution
View Details and Specs
PVD Series
Our compact, robust, industrial pumping solution
View Details and Specs
VD Series
High capacity pump, for industrial applications
View Details and Specs
PKS Series
Durable workhouse
View Details and Specs
PBL Series
High Inlet Pressure Application
View Details and Specs
PFL Series
Large capactiy, fast, high vacuum pump
View Details and Specs
ULK Series
Fast, compact, high vacuum pump
View Details and Specs
Dry Pumps
LS Series
CR Series
LR/HR/UR Series
Eco-Shock Power Saving Attachment
Small Dry Pumps
DTC Series
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DAU/DTU Series
DOP Series
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DA Series
DISL Series
Mechanical Booster Pumps
PRC Series
PMB-D Series
PMB-C Series
MBS Series
Rotary Vane Pumps
GHD Series
GLD Series
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VS 650A/750A Single Stage
VS Series
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VD Series
Rotary Piston Pumps
PKS Series
Oil Diffusion Pumps
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