- High pumping speed near atmospheric pressure drastically reduces pump down time.
- Built-in ECO-SHOCK technology reduces power consumption significantly for clean applications.
- Built-in silencer achieves a noise level of 61dB(A) or less
- Low Running-Cost
- Available in 4 models with pumping speeds betweenn 120~1200m3/h
Clean Process ("C-Type"): For clean processes involving gasses like Air and N2
- TMP backing pump etc.
- Load lock room
- Vapor deposition
Light Process ("L-Type"): For light processes involving steam and other difficult gases
- General industrial use
- Freeze drying
- Vacuum drying