Features
- High pumping speed near atmospheric pressure drastically reduces pump down time.
- Built-in ECO-SHOCK technology reduces power consumption significantly for clean applications.
- Built-in silencer achieves a noise level of 61dB(A) or less
- Low Running-Cost
- Available in 4 models with pumping speeds betweenn 120~1200m3/h
Applications
Clean Process ("C-Type"): For clean processes involving gasses like Air and N2
- TMP backing pump etc.
- Load lock room
- Lamination
- Vapor deposition
- Sputtering
Light Process ("L-Type"): For light processes involving steam and other difficult gases
- General industrial use
- Ashing
- Freeze drying
- Vacuum drying
Engineered for Performance and Savings
The LS Series features conical-shaped, variable-pitch, deeply machined steel screws that maximize efficiency across the pressure range. This innovative design not only accelerates pump-down times but also ensures low power consumption and quieter operation—making it ideal for both new systems and retrofits.
Experience faster cycle times, lower operating costs, and a smaller footprint—choose the ULVAC LS Series for your next-generation vacuum solution.
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC Vacuum Pump Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate
