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ENVIRO-Optima
The ENVIRO-Optima resist strip system provides the highest throughput per m2 of clean-room space at the lowest cost.
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NA-8000
Luminous NA series ashing systems can be used for all sizes of wafers and is compatible with a wide range of processes from critical processes for next generation wafers to wafer level packaging processes.
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SME Series
The SME series deposition system is capable of handling up to 200mm substrate size and is available in several configurations from single to six process chambers.
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SRH Series
The SRH PVD system is designed specifically to handle thin wafers and deposit films for UBM and other applications.
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