Key Features
- Cassettes available to use trays or standard wafers
- Configurable heaters up to 700C
- Single or multicathodes available
- DC or RF power supplies
- Available with rotating stage
- PC based system
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC System Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate
