NE-550EXa is a multipurpose high-density plasma etching system, especially for test facilities such as universities and government agencies.
NE-950EX Dry Etching high throughput system, designed for the LED market.
Dry etching system for high volume production with good cost performance and wide selection of tool configuration.
Industry Leading Deep Oxide Etching
Batch-Type chemical cleaning system used for the removal of native oxide in narrow and deep-contact patterns found in advanced semiconductor devices.