The SME series deposition system is capable of handling up to 200mm substrate size and is available in several configurations from single to six process chambers.
The SPW roll coater series is perfect for depositing multilayer films on rolls up to 1.65 meters in width.
Vertical Deposition results in low particle generation.
EW Series models are deposition systems for evaporation of metal or oxides onto continuously-wound plastic film, paper or metal foil.
Batch-Type high vacuum evaporation system.
Inline evaporation system.