Key Features
- Cassettes available to use trays or standard wafers
- Configurable heaters up to 700C
- Single or multicathodes available
- DC or RF power supplies
- Available with rotating stage
- PC based system
Low-Temp Sputtering
The SME system is available with several core types; square, hexagonal or octaganol. This allows the user to configure the system from R&D to high volume production. Additionally, the customer can configure process chambers with various heaters and cathodes to ensure it meets their process needs.
Related Systems and Components
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