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SME Series
The SME series deposition system is capable of handling up to 200mm substrate size and is available in several configurations from single to six process chambers.
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uGmni Series
ULVAC's brand new Cluster System for PVD, CVD, Etch, Ash and More -
SRH Series
The SRH PVD system is designed specifically to handle thin wafers and deposit films for UBM and other applications.
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ULDiS Series
ULDiS series PVD system for production of optical filters and coatings.
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SMV-500F
The ULVAC SMV-500F sputtering system is used for seed layer (Ti/Cu) PCB interposers.
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