The SME series deposition system is capable of handling up to 200mm substrate size and is available in several configurations from single to six process chambers.
uGmni SeriesULVAC's brand new Cluster System for PVD, CVD, Etch, Ash and More
The SRH PVD system is designed specifically to handle thin wafers and deposit films for UBM and other applications.
ULDiS series PVD system for production of optical filters and coatings.
The ULVAC SMV-500F sputtering system is used for seed layer (Ti/Cu) PCB interposers.
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