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Specifications
- Auto Loader, 3 process modules, 1 loadlock
- Substrates size ~500mm
- Low temperature process cooling systems
- Can deposit on various substrate sizes
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC System Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate