Features
- The LR series pump is designed for load lock chambers and PVD processes.
- ULVAC's unique aluminum design allows for very uniform temperature distribution throughout the pump body: The HR series pump is designed for CVD and etch processes.
- ULVAC LR series pump is designed for applications that require a heated pump, heated gas lines, and/or heated exhaust lines
- Excellent helium pumping capability
- Canned motor for safety and ease of maintenance
- Withstands power interruptions up to 500ms.
- Internal components are specially treated providing a high degree of surface hardness and outstanding corrosion resistance. This prevents wear and tear of internal pump parts when exposed to corrosive gasses.
- Extensive pump control is available including data recording and export.
- CE marking is available upon request.
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC Component Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate