Features
- Optimized design for quite operations
- Easy maintenance
- Forced oil circulation system ensures stable pumping speed below atmospheric pressure
- Totally enclosed fan cooled 3 phase AC motor
Applications
- Evaporation, sputtering, ion plating
- Analysis devices, leak test equipment
- Gas substitution/supply, vacuum insulation
- Vacuum drying, freeze-drying, vacuum degassing, vacuum packing, vacuum chuck, vacuum molding
Safety Data Sheet
R-2 ULVAC Vacuum Pump Oil - SDS
R-2000 ULVAC Vacuum Pump Oil - SDS
R-7000 ULVAC Vacuum Pump Oil - SDS
R-80 ULVAC Vacuum Pump Oil - SDS