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Best-In-Class Ash Rate

Enviro Series Plasma Ashing

Smaller. Quieter. Faster.

Replace your old dry pumps with ULVAC's innovative new screw pump.

Find Smaller Leaks, Faster.

The Worlds Fastest Pumping Speed for Helium Leak Detectors

Best-In-Class Ash Rate

Enviro Series Plasma Ashing

Smaller. Quieter. Faster.

Replace your old dry pumps with ULVAC's innovative new screw pump.

Find Smaller Leaks, Faster.

The Worlds Fastest Pumping Speed for Helium Leak Detectors

ULVAC The ULtimate in VACuum Technology

Innovative solutions to complex problems

Dedicated to solving emerging technical needs and providing long term support

Featured System

Mass Production 300mm Sputtering

The Entron-EX multi-chamber sputtering system is specifically designed for the 300mm Semiconductor market. This system is equipped with the latest process chambers for advanced 300mm processing.

Featured Products

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Reliable Vacuum Solutions for Analytical Excellence

For life sciences applications requiring clean, reliable vacuum performance, ULVAC’s small dry pumps deliver exceptional precision with oil-free operation, ensuring contamination-free environments for sensitive instruments. Whether supporting mass spectrometry, liquid handling, or diagnostic devices, ULVAC small dry pumps provide the consistent vacuum power needed to enhance efficiency, protect samples, and drive scientific innovation.