Key Features
- Flexible module configuration.
- System can run both PVD and CVD/ALD process.
- Many applications including: (NVM, Al & Cu wiring, TI/TiN barrier metal, thick AL and Co/Ni salicide etc.)
- Process capability for not only Si devices but also compound semiconductor.
- 10 process modules maximum.
- Single or Tandem platforms are available.
- High Throughput system with great reliability.
- Highly reliable Rorze EFEM used for atmospheric transfer.
- Equipped with the latest control system that complies with the next generation semiconductor Fab.
- Semi Compliant.
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC System Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate