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DC Power Supply
ULVAC’s Digital DC Series is engineered to support the most demanding film deposition environments. From semiconductor fabrication to advanced optical coatings. -
EW Series
EW Series models are deposition systems for evaporation of metal or oxides onto continuously-wound plastic film, paper or metal foil.
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Ei-5
Batch-Type high vacuum evaporation system.
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Ei-H series
Inline evaporation system.
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Qulee RGM2
Designed to meet the demands of diverse process monitoring applications, including etching, CVD, and other reactive gas processes. -
SME Series
The SME series deposition system is capable of handling up to 200mm substrate size and is available in several configurations from single to six process chambers.
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SPW Series
The SPW roll coater series is perfect for depositing multilayer films on rolls up to 1.65 meters in width.
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SIV Series
Vertical Deposition results in low particle generation.
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CS-200
The CS-200 is a compact load-lock type sputtering system. suitable for research & development and for small and medium-scale production.
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