Contact

SIV Series

  • Share

Inline Panel Sputtering

The SIV inline system is meant for PVD onto substrates up to 1,000mm x 1,000mm. An excellent tool for depositing LCO, LPO, and ITO onto panels. System is capable of 500mm max substrate size. Stocker chamber can be added to enable automatic running of system.

Get More Information

Request Engineering Information Request a Demo 978-686-7550

Key Features

  • Substrate size: 1,000mm x 1,000mm
  • RTA module integrated
  • Special designed chamber for LCO, LPO deposition
  • Special cathode equipped for particle reduction
  • High quality/density LCO/LPO target deliverable with tool
  • Pass-by or continous deposition
  • ITO Deposition

Need More Information?

Contact ULVAC