Features
- Measures metal thickness and sheet resistance non-destructively and without contact.
- Built-in models have compact eddy current sensors and fast measurement speed for easy intergration into PVD, CVD, plating and other systems.
- ULVAC's original automatic adjustment method eliminates measurment drift, and enables film thickness measurements with outstanding reproducibility.
- Database for film thickness calculation can be created easily, enabling thickness measurement of almost any metal or alloy.
Applications
- Metal film thickness quality control on semiconductor manufacturing lines
- Deposition system status checks, process evaluations
- Providing real-time process control information to deposition systems
