Features
- Measures metal thickness and sheet resistance non-destructively and without contact.
- Built-in models have compact eddy current sensors and fast measurement speed for easy intergration into PVD, CVD, plating and other systems.
- ULVAC's original automatic adjustment method eliminates measurment drift, and enables film thickness measurements with outstanding reproducibility.
- Database for film thickness calculation can be created easily, enabling thickness measurement of almost any metal or alloy.
Applications
- Metal film thickness quality control on semiconductor manufacturing lines
- Deposition system status checks, process evaluations
- Providing real-time process control information to deposition systems
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC Component Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate
