Features
- Switch between two deposition sensors
- Low deposition rate process control with high film-thickness resolution
- Sampling rate of 125ms provides excellent output response
- Up to 99 deposition programs can be stored with battery backup.
- Controller memory can record up to 30 process sequences
- RS232C interface is included as standard
- 12ch digital programmable input/output
- The 3ch programmable analog output signals (Power, Rate, Thickness)
- Up to 3 steps can be input for pre-heating and rate control for very precise control.
Applications
- Film thickness and deposition rate control during evaporation.
