ULVAC offers a comprehensive lineup of vacuum pumps engineered to meet the demanding needs of analytical instrumentation. Whether precision, reliability, or compact performance is required, our solutions deliver the stable vacuum environments critical for accuracy and repeatability.
- GHD Series Dry Pumps – Designed for clean, oil-free operation with low maintenance requirements. The GHD Series ensures stable vacuum performance for analytical systems that demand long-term reliability and minimal contamination risk.
- GLD Series Rotary Vane Pumps – High-performance, quiet, and compact, the GLD Series delivers consistent pumping speed and reliability for sensitive analytical systems.
- DA Series Dry Diaphragm Pumps - Compact and versatile, ULVAC’s DA Series offers a wide range of pumping speeds and ultimate pressures to fit diverse needs. Its clean, quiet design is ideal for lab benches, supporting applications from wafer handling to general non-corrosive laboratory use.
From routine analysis to advanced instrumentation, ULVAC pumps deliver the precision, durability, and clean performance analytical applications rely on.ULVAC vacuum pumps are engineered to integrate seamlessly into a wide range of analytical instruments, where stable and clean vacuum performance is essential.
- Mass Spectrometers (MS): Reliable vacuum for ion path stability and high-resolution analysis.
- Gas Chromatography–Mass Spectrometry (GC-MS): Clean operation ensures accurate separation and detection of trace compounds.
- Scanning Electron Microscopes (SEM): Stable vacuum environments for high-magnification imaging and surface characterization.
- Transmission Electron Microscopes (TEM): Ultra-clean pumping to support nanoscale imaging and diffraction studies.
- X-ray Photoelectron Spectroscopy (XPS / ESCA): Precise vacuum control for elemental and chemical state analysis.
- Auger Electron Spectroscopy (AES): Reliable pumping for surface-sensitive compositional analysis.
- Residual Gas Analyzers (RGA): Low contamination pumping critical for detecting trace gas species.
- Thin Film Deposition (Quartz Crystal Microbalances): Stable pumping ensures accurate film thickness and rate measurements.
- Sample Preparation & Wafer Handling Tools: Quiet, compact pumping for clean laboratory and semiconductor environments.
