MEMS and Sensors Executive Congress
ULVAC is a comprehensive manufacturer of vacuum equipment and components, with extensive experience in the Semiconductor, Advanced Electronics, and Flat Panel industries. ULVAC offers a full suite of equipment for MEMS Manufacturing including our newly introduced Gemini cluster sytem for PVD, CVD, Etch, Ash and more. ULVAC is proud to once again partner with SEMI as a sponsor.
Join us Virtually and In Person at MEMS and Sensors Executive Congress October 11th, 12th and 13th!
uGmni - Complete SolutionULVAC is proud to introduce our brand new uGmni platform, a modern and comprehensive cluster system built to equip a wide range of process modules including PVD, CVD, Etch and Ash for a complete MEMS Manufacturing Solution.
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MEMS Manufacturing SolutionsIn addition to the uGmni Platform, ULVAC continues offers a complete line-up of individual tools perfect for your manufacturing process flow or research lab. Take a look at our complete MEMS Manufacturing Solutions, from Pilot Line to High Volume Manufacturing.
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Featured Equipment:
Gemini Series - Cluster System for PVD, CVD, ETCH and more..
Enviro Series - Advance Plasma Resist Strip
NLD Series - Deep Oxide Etching System
Need More Information?
Contact ULVAC
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