ULVAC Featured Component Products
SEMICON 2025: ULVAC highlights our advanced component lineup, including high-performance dry pumps, precision leak detectors, reliable vacuum gauges, and next-generation deposition controllers. These proven solutions deliver accuracy, efficiency, and stability to support the most demanding semiconductor processes.
At SEMICON, ULVAC is showcasing a comprehensive portfolio of advanced components that power precision, reliability, and efficiency in semiconductor and high-tech manufacturing. From vacuum generation and leak detection to process monitoring and film control, these solutions are engineered to meet the industry’s most demanding requirements while supporting next-generation innovation.
LS Series Dry Screw Vacuum Pumps
Designed for high-load, continuous operation, the LS Series delivers clean, oil-free pumping with excellent durability and energy efficiency. Ideal for demanding semiconductor and industrial applications requiring stable, long-term performance.
CR Series Air-Cooled Dry Vacuum Pumps
A compact, maintenance-friendly pump that eliminates the need for cooling water. With air-cooled operation and low power consumption, the CR Series provides efficient, reliable vacuum performance in a small footprint; perfect for labs and production lines.
HELIOT 900 Series Leak Detectors
High-sensitivity helium leak detectors engineered for fast, accurate leak detection. With advanced turbo pumping technology and intuitive operation, the HELIOT 900 ensures process reliability and uptime across semiconductor, R&D, and manufacturing environments.
Qulee with YTP Quadrupole Mass Spectrometer + Differential Pumping Kit
A powerful tool for residual gas analysis, the Qulee with YTP option enhances sensitivity and stability, even under higher pressure conditions. Equipped with differential pumping, it provides precise diagnostics for process monitoring and contamination control.
G-Tran SH/ST200 Precision Ionization Gauges
Robust Bayard-Alpert type ionization gauges delivering highly accurate pressure readings from high vacuum to ultra-high vacuum ranges. Their reliability and precision make them essential for monitoring and controlling advanced vacuum systems.
CRTM-R1 Series Quartz Crystal Deposition Controllers
Next-generation controllers offering ultra-high film thickness and deposition rate resolution (0.0022Å). With multi-sensor support, advanced logging, and simultaneous multi-material control, the CRTM-R1 sets the benchmark for thin film process precision.
ULVAC Analytical Vacuum Solutions
ULVAC offers a comprehensive lineup of vacuum pumps engineered to meet the demanding needs of analytical instrumentation. Whether precision, reliability, or compact performance is required, our solutions deliver the stable vacuum environments critical for accuracy and repeatability.
- GHD Series Dry Pumps – Designed for clean, oil-free operation with low maintenance requirements. The GHD Series ensures stable vacuum performance for analytical systems that demand long-term reliability and minimal contamination risk.
- GLD Series Rotary Vane Pumps – High-performance, quiet, and compact, the GLD Series delivers consistent pumping speed and reliability for sensitive analytical systems.GLD Series Rotary Vane Pumps – High-performance, quiet, and compact, the GLD Series delivers consistent pumping speed and reliability for sensitive analytical systems.
- DA Series Dry Diaphragm Pumps – Compact and versatile, ULVAC’s DA Series offers a wide range of pumping speeds and ultimate pressures to fit diverse needs. Its clean, quiet design is ideal for lab benches, supporting applications from wafer handling to general non-corrosive laboratory use.
From routine analysis to advanced instrumentation, ULVAC pumps deliver the precision, durability, and clean performance analytical applications rely on.
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