Features
- Provides gas analysis with an optional differential pumping unit
- Utilizes standard vacuum unit model YTP-50M
- Provides visual data without need for a PC
- One-click function for easy operation, no complex procedures
- Selectable maximum measurable pressures 500Pa, 100Pa, 10Pa, and 1Pa
- (3.75Torr, 0.75Torr, 7.5 x 10-2Torr, and 7.5 x 10-3Torr / 5mbar, 1mbar, 0.1mbar, and 1.0 x 10-2)
- Select from the mass numbers 1 to 100 (BGM-101/102), 1 to 200 (BGM-201/202), 1 to 300 (HGM-302)
- Complete Leak Test Function (Helium leak test, air leak test, leak up test)
- Software included (Windows XP/7)
Applications
- Various types of gas analysis for research and development
- Gas monitoring of PVD system during processing
- Residual gas analysis in PVD system
- Residual gas analysis for high vacuum pumping equipment, etc.
- Atmospheric pressure (10+5Pa, 760Torr, 1013mbar) of gas analysis (Atmospheric pressure type)
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC Component Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate