Features
- Provides gas analysis with an optional differential pumping unit
- Utilizes standard vacuum unit model YTP-50M
- Provides visual data without need for a PC
- One-click function for easy operation, no complex procedures
- Selectable maximum measurable pressures 500Pa, 100Pa, 10Pa, and 1Pa
- (3.75Torr, 0.75Torr, 7.5 x 10-2Torr, and 7.5 x 10-3Torr / 5mbar, 1mbar, 0.1mbar, and 1.0 x 10-2)
- Select from the mass numbers 1 to 100 (BGM-101/102), 1 to 200 (BGM-201/202), 1 to 300 (HGM-302)
- Complete Leak Test Function (Helium leak test, air leak test, leak up test)
- Software included (Windows XP/7)
Applications
- Various types of gas analysis for research and development
- Gas monitoring of PVD system during processing
- Residual gas analysis in PVD system
- Residual gas analysis for high vacuum pumping equipment, etc.
- Atmospheric pressure (10+5Pa, 760Torr, 1013mbar) of gas analysis (Atmospheric pressure type)
