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Qulee CGM2

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Qulee CGM2 Compact Gas Monitor

“Qulee” (pronounced as “KLEE”), is ULVAC’s latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity. The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).

 

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The ULVAC Qulee Process Gas Monitor is a compact residual gas analysis solution designed for sputtering equipment and optimized for process management, helping users monitor residual moisture, impurities, leaks, hydrocarbons, siloxanes, and Galden-related compounds with high accuracy directly at process pressure. Built for simplicity and production-floor usability, the Qulee supports real-time gas monitoring without the need for a differential pumping system.
The NEW CGM2 models capable of measuring up to 1 ~ 100 amu in mass have been added to the Qulee CGM2 series for sputtering equipment. In addition to monitoring Air leaks and residual moisture, it is now possible to measure refrigerant leaks, sliding grease, hydrocarbons and cleaning fluid residue. With the addition of the lineup, customers can now make even more choices to suit their needs.

Qulee CGM2 Features

  • Ideal for process monitoring of various sputtering sysytem
  • Monitoring the Air Leak
  • Management of residual moisture
  • No differential pumping system required (less than 1 Pa at 7.5 x 10^-3 Torr / 1 x 10^-2 mbar)
  • Built-in display: PC-free
  • Highly sensitive leak test possible (CGM2-052). More leak testing.
  • Various leak tests available (Helium leak test, air leak test, assembly test)
  • Total pressure measurement (ionization gauge) possible
  • Includes a Quick Install Package system (QIP). Automatic measurement package (see option catalog for details)
  • Qulee QCS is included: this software is included and compatible with Windows 8/10/11
  • Conforms with CE

Applications

  • Process monitoring for PV, FPD, and semiconductor system
  • Residual gas analysis in PVD system
  • Impurities (H2O, etc.) control in PVD system
  • For leak testing

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At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.

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For inquiries outside North and South America, please contact ULVAC Corporate
 
CGM2 Specifications

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