Features
- Ideal for process monitoring of various sputtering sysytem
- No differential pumping system required (at 1Pa (7.5×10-3Torr / 1×10-2 mbar) lower)
- Integrated Display: No need for PC
- Simple Operation: "One Click" function
- Max 120°C (248°F) high temperature bake (250°C (482°F) when sensors are removed)
- Electron bombard degas
- Ion source and secondary electron multiplier protection maintenance help function
- Traceability of analysis tube (patent pending)
- Various Leak Tests are Available (Helium leak test, air leak test, built-up test)
- Capable of total pressure measurement (ionization gauge)
- Qulee QCS is Included:
- This software is included and compatible with (Windows XP/7)
- QIP (Quick Install Package system) is Included:
- Auto measuring package (refer to options catalog for details)
- Conforms with CE
Applications
- Process monitoring for PV, FPD, and semiconductor system
- Residual gas analysis in PVD system
- Impurities (H2O, etc.) control in PVD system
- For leak testing
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC Component Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate