Features
- Ideal for process monitoring of various sputtering sysytem
- No differential pumping system required (at 1Pa (7.5×10-3Torr / 1×10-2 mbar) lower)
- Integrated Display: No need for PC
- Simple Operation: "One Click" function
- Max 120°C (248°F) high temperature bake (250°C (482°F) when sensors are removed)
- Electron bombard degas
- Ion source and secondary electron multiplier protection maintenance help function
- Traceability of analysis tube (patent pending)
- Various Leak Tests are Available (Helium leak test, air leak test, built-up test)
- Capable of total pressure measurement (ionization gauge)
- Qulee QCS is Included:
- This software is included and compatible with (Windows XP/7)
- QIP (Quick Install Package system) is Included:
- Auto measuring package (refer to options catalog for details)
- Conforms with CE
Applications
- Process monitoring for PV, FPD, and semiconductor system
- Residual gas analysis in PVD system
- Impurities (H2O, etc.) control in PVD system
- For leak testing
