Features
- Measures from atmospheric pressure to 5 x 10-2 Pa.
- Combined sensor and controller, thus reducing cables, saving space and energy.
- Operates with DC 24V input
- Pressure is 0 to 10V Log output
- LED Error verification for better visibility
- Atmospheric pressure adjustment and zero point adjustment can be done in one-touch.
- Sensor unit can be replaced easily.
- Flexible analog output: Analog output compatible with models users already own. *SW100-A: Analog output spec.
- Higher usability: Easy set point setting or status checking, etc. by connecting Windows PC / Android.
- Excellent shock resistance: Sensor head that has excellent shock resistant structure.
- Excellent corrosion resistance: Corrosion resistant filament material: platinum.
- Conforms with CE
Applications
- Process control in low vacuum processes such as for semiconductor, optics and electronic parts manufacturing systems.
- Process control in low vacuum range processes for industrial equipment such as vacuum furnaces, etc.
- Process control for low vacuum system, which requires multiple process chambers, such as in-line sputtering and single wafer processing equipment.
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC Component Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate