Features
- Can measure a wide pressure range from 9.9 to 5×10-8Pa (GI-M2) (7.4 x 10-2 to 3.75 x10-10 Torr, 9.9 x 10-2 to 5 x 10-10 mbar)
- 2 types vacuum tube, metal and glass: Sensor head selected depending on the application (bare type also available)
- Small-sized metallic sensor head prevents it from breaking (GI-M2)
- Sensitivity setup can be changed for different gases. Allowing even more accurate pressure measurement.
- Ideal for fixing the measurement range
- 2 set points output
- Switch 1/2 filament, sensitivity setting, range hold function, Degas
Function
- RS232C communication
- BCD output
- Pressure is 0 to 10V Log output (psudo-log output)
Applications
- GI-M2
- Sputtering system
- Vacuum evaporation system (Turbo-molecular pump type)
- Pressure measurement for other general ultra-high vacuum pumping system
- GI-D7
- Vacuum heat treatment furnace
- Vacuum brazing furnace
- Vacuum evaporation system(diffusion pump type)
- Process control for furnaces and other industrial equipment