Features
- Can measure a wide pressure range from 9.9 to 5×10-8Pa (GI-M2) (7.4 x 10-2 to 3.75 x10-10 Torr, 9.9 x 10-2 to 5 x 10-10 mbar)
- 2 types vacuum tube, metal and glass: Sensor head selected depending on the application (bare type also available)
- Small-sized metallic sensor head prevents it from breaking (GI-M2)
- Sensitivity setup can be changed for different gases. Allowing even more accurate pressure measurement.
- Ideal for fixing the measurement range
- 2 set points output
- Switch 1/2 filament, sensitivity setting, range hold function, Degas
Function
- RS232C communication
- BCD output
- Pressure is 0 to 10V Log output (psudo-log output)
Applications
- GI-M2
- Sputtering system
- Vacuum evaporation system (Turbo-molecular pump type)
- Pressure measurement for other general ultra-high vacuum pumping system
- GI-D7
- Vacuum heat treatment furnace
- Vacuum brazing furnace
- Vacuum evaporation system(diffusion pump type)
- Process control for furnaces and other industrial equipment
Need more information?
At ULVAC, we understand that finding the right product is crucial for optimizing your processes, whether you're scaling up production or maintaining precision in your systems. With our wide range of cutting-edge vacuum technologies and in-depth expertise, we will guide you through selecting the ideal solution tailored to your unique requirements.
Contact ULVAC Component Sales & Support For inquiries outside North and South America, please contact ULVAC Corporate