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Integrated Display Ionization Gauge

Hot cathode type ionization vacuum gauge, capable of measuring pressure in the 9.9 to 5 x 10-8 Pa (7.4 x 10-2 to 3.75 x10-10 Torr, 9.9 x 10-2 to 5 x 10-10 mbar)
Metal gauge, GI-M2:, 6.7 x 10-1 to 10-6 Pa (5 x 10-3 to 9.75 x10-9 Torr, 6.7 x 10-3 to 1.3 x 10-8 mbar)
Glass gauge, GI-D7: range using triode tube or B-A type sensor heads.

 

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Features

  • Can measure a wide pressure range from 9.9 to 5×10-8Pa (GI-M2) (7.4 x 10-2 to 3.75 x10-10 Torr, 9.9 x 10-2 to 5 x 10-10 mbar)
  • 2 types vacuum tube, metal and glass: Sensor head selected depending on the application (bare type also available)
  • Small-sized metallic sensor head prevents it from breaking (GI-M2)
  • Sensitivity setup can be changed for different gases. Allowing even more accurate pressure measurement.
  • Ideal for fixing the measurement range
  • 2 set points output
  • Switch 1/2 filament, sensitivity setting, range hold function, Degas

Function

  • RS232C communication
  • BCD output
  • Pressure is 0 to 10V Log output (psudo-log output)

Applications

  • GI-M2
    • Sputtering system
    • Vacuum evaporation system (Turbo-molecular pump type)
    • Pressure measurement for other general ultra-high vacuum pumping system
  • GI-D7
    • Vacuum heat treatment furnace
    • Vacuum brazing furnace
    • Vacuum evaporation system(diffusion pump type)
    • Process control for furnaces and other industrial equipment 
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