Features
- Gauge cost is reduced because the display has been eliminated
- Smaller size frees-up control panel space
- Wiring is reduced
- Simplified Maintenance
- Filament is eliminated - No damage from exposure to atmospheric pressure
- Control output signal - 2 setpoint output
- Output signal - Pressure reading is a 0 to 10V Log output (non-linear output)
- Power supply voltage - Operated by DC24V
Applications
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Process Control In
- Precision vacuum equipment used for semiconductor, optics and electronic parts manufacturing
- Low vacuum for industrial equipment
- Vacuum systems with multiple process chambers, such as in-line sputtering and single wafer processing equipment