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12/354/21 ULVAC Expands Process Capability of Production Proven Optima Dry Strip Systems
Methuen, Massachusetts: ULVAC Technologies, Inc. a manufacturer of semiconductor equipment as the US subsidiary of ULVAC, Inc. announces the release of expanded processing capability for the Optima line of dry strip tools. With the addition of microwave frequency plasma source technology, the Optima can support a wider range of process requirements.
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01/29/21 ULVAC Launches the uGmni Series Custer System; Combining Deposition and Etch Modules' for Manufacturing Advanced Electronics
ULVAC, Inc. (Headquarters: Chigasaki, Kanagawa; President and CEO: Setsuo Iwashita; hereafter referred to as ULVAC) today announced the launch of uGmni Series cluster system combining deposition and etch modules' which enables our customers to equip a variety of different process modules including sputter, etch, CVD and others on the same transfer core.
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