- The substrate transfer system uses the latest winding control technology, ensuring stable transfer for every substrate material and size.
- Induction heating, resistance heating, and EB heating evaporation sources are available. The optimum source for the application can be selected.
- A wide range of pre- and post-process mechanisms are available to enable optimum process conditions.
- Film thickness monitors for online measurement are available (transmission film thickness monitor, eddy current film thickness monitor, resistance value monitor, others).