Key Features
- The SPW-030 and SPW-165 modules offer different processes and production volumes.
- Can be applied to various applications by selecting and adding modules.
- Can be operated at floor level.
- Excellent gas separation performance and improved sputtering process enable rapid deposition of high grade films.
- SPW-030 is capable of handling rolls up to 300mm wide
- SPW-165 is capable of handling rolls up to 1.65m wide