 Turbo
Molecular Pumps
UTM Series Pivot Bearing Type
Turbo Molecular Pumps
ULVAC's UTM Series of turbo molecular
pumps use high-performance bearings unlike those in common
use, enabling outstanding features.
Features
- Non-contact magnetic bearings in the top (using
permanent magnets) and pivot bearings in the bottom (using
fluorine oil) completely eliminate mechanical contact during
high-speed rotation.
- Don't require time-consuming oil changes or
bearing replacements, enabling long bearing life.
- Use fluorine-based oil with saturation vapor
pressure of around 10-11 Pa (at 20ºC), so atmosphere
stays completely oil-free.
Fine dynamic balance rotor and high-performance bearings
enable high-speed rotation.
- Enables high compression ratio for hydrogen,
helium and other gases with low molecular weights.
- Fine dynamic balance rotor and high-performance
bearings enable surprisingly low noise and vibrations.
Applications
- Evacuation of analysis equipment
- As rough vacuum pumps for accelerators and
beam lines
- High-vacuum evacuation of laboratory equipment
Specifications
| Model |
UTM -50 |
UTM-150 |
UTM-300 |
UTM-500 |
UTM-1500 |
| Inlet flange size |
CF |
CF114 |
CF152 |
CF203 |
CF305 |
| JIS VG |
65 |
100 |
150 |
250 |
| Outlet flange size |
NW16 |
NW25 |
NW40 |
JIS VF50 |
| Pumping speed (l/s) (*1,
*2) |
N2 |
50 |
190 |
300 |
550 |
1600 |
| N2 |
40 |
160 |
260 |
500 |
1650 |
| Maximum compression ratio (*1,
*3) |
N2 |
108 |
| N2 |
103 |
104 |
| Ultimate pressure (Pa)
(*1, *3) |
10-7 |
10-8 |
| Bearing type |
Top |
Permanent magnet bearings |
| Bottom |
Pivot bearings |
| Cooling method |
Air-cooled/water-cooled |
| *1 |
Value measured in accordance with JVIS005 standard,
or calculated value based on it |
| *2 |
Evacuation speed values are values when protective
mesh isn't used. |
| *3 |
Values given are orders of magnitude. |
Click here to
download the PDF file for general information.
Click here to
download the PDF file for UTM-50 pump.
Click here to
download the PDF file for UTM-150/300 pump.
Click here to
download the PDF file for UTM-500/1500 pump.
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
