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Residual Gas Analyzer
Qulee
 "Qulee" (pronounced as "KuLee"), is the Japanese word for a 4-leaf clover, and is the name for ULVAC's newest quadrupole residual gas analyzer. This CGM (Compact Gas Monitor) can measure residual gas pressures during processes and achieves high measurement accuracy and resolution up to a high pressure of 1 Pa without the need for differential pumping. This unit also features the utmost in simplicity of design and operation. Many requests from facility engineers working in production lines across a broad range of industries have been incorporated into the features of this new RGA.
Features
- High resolution quadrupole mass spectrometer
- High accuracy at high pressure (1Pa) without differential
pumping
- One touch operation
- Displays partial pressure of He/H20/N2/O2/Any
Gas
- Total pressure function
- Bakeable to 250°C
- Mass range 1-50 amu
 Applications
- Residual gas analysis in PVD system
- Gas monitoring of PVD system during processing
Specifications
| Item |
Qulee
CGM
|
| Model No. |
CGM-051 |
CGM-052 |
| Mass Filter
Type |
Quadrupole |
| Mass Range |
1 - 50 amu |
| Resolution |
M/ M=1M(10% P.H.) |
| Sensitivity |
0.1uA/Pa |
0.1mA/Pa |
| Minimum
Detectable Partial Pressure |
1X10-7Pa |
1X10-10
Pa |
| Detector
Type |
Faraday
Cup |
EM Tube/Faraday
Cup |
| Maximum
Operating Pressure |
2Pa |
2Pa(FC)
1e-2Pa(SEM) |
| Linearity |
1Pa |
| Total Pressure
Function |
capable
|
| One Click
function |
capable/He/H2O/N2/O2/Any
Gas |
| One Click
Leak Test function |
capable |
| Power Input |
DC24V |
| Maximum
Sensor Operating Temperature |
120°C |
| Maximum
Bakeout Temperature(electronics removed) |
250°C |
| Operating
Temperature |
10-40°C
|
| Standard
Software |
Qulee QCS
(Windoes2000/XP)
|
 Applications
This “Qulee QCS” is a software for
Quadruple Mass Spectrometer that can be used for almost all
models of ULVAC Mass Spectrometer. RS232C and RS485 are applicable.
It enables you to control the units and convert the data to
CSV easily. Our old model, that includes QCS 2001 or MSQ-400,
MM200 etc., can upgrade to “Qulee QCS”. Please
contact us for detail.
 Features
- Possible to connect up to 8 sets
- Recipe setting
- Easy operation by short-cut button
- Easy leak check in the helium leak test mode
- Includes background subtraction and measured
area
integration
- Save 2 analog data at once
- Possible to set 2 partial pressure set-point
output
- Possible to convert the data into CSV easily
Scan Mode
Trend Mode
| Model |
Qulee QMS |
OS |
Windows 98, Me, NT4, 2000, XP |
Interface |
RS-232C/485 |
Sensor Number |
Max. 8 |
Sensor model |
Qulee/REGA/REPROS/
SEPION (+SIM)/
ST-400 (+SIM*) |
Recipe |
100 (user to setup and control
70) |
Sweep speed |
50, 100, 200, 500, 1000, 2000
msec/mass |
Sampling interval |
Auto, 0.5 - 1000sec (Trend mode),
1 - 1000 sec (Scan mode) |
Measurement end time |
sequence or at random is available |
Measurement
mode
|
Scan mode:
Mode to scan arbitrary range continuously |
Trend mode:
Mode to measure arbitrary mass number selectively
(20ch) |
Leak-test mode:
One touch helion leak testing |
Analog mode:
Mode to provide peak top setting value of spectrum |
Sensitivity Calibration:
Mode to calibrate sensitive of SEM |
Degas mode:
Mode to degas ion source (SEPION) |
Indication of gas composition
name |
Able to indicate the gas composition
name in scan and trend mode |
Function |
Background subtraction/Integration
of measured area |
Analog Input |
2Ch: 0 - 10V |
Set-point |
2Ch (partial pressure set-point) |
Ionization voltage |
20 - 70eV (only REPROS) |
| Model |
Qulee QCS |
Process for error |
Filament, SEM, RF, External |
Display
|
Vertical axis :
Changeover between linear/logarithmic, selection of
display range[A / Pa] |
Horizontal axis :
Modifying the mass number and time and scrolling |
Display of stored data
(Display during measurement is possible) |
Setting of simultaneous display
of a bar graph and
line graph is possible |
Data Save
|
Auto save, confirmation, no save |
The file name is generated from
the clock of PC automatically |
File can be converted to CSV format |
Any desired file name can be set |
| Print Data |
Printing of graph in scanning, trend,
and analog mode is possible |
Setting of the range of printing
screen. Setting of colors of data and setting of the
width of lines of trend graph |
Option |
RS-232C/485 converter, PC |
|
Specification of PC |
HDD has 2MB of empty capacity
(not including measurement data) More than 64MB
RAM and more, CPU is Pentium 200MHz and more Screen
display area is 800 x 600 and more,
Floppy Drive is available.
COM port (RS232C) is available.
with CD-ROM drive
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For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
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