Other Pumps
 PGT
Series Titanium Getter Pumps
ULVAC's titanium getter pumps (PGT
Series) and power supplies for titanium getter pumps (GGT
Series) are units for passing current directly through titanium
alloy in a vacuum to sublimate it. The sublimated titanium
creates a large-volume activated metal surface on the surrounding
walls, and chemically activated gas is adsorbed and evacuated.
Features
- Selecting the proper adsorption surface area
for the sublimated titanium can produce a high evacuation
speed and improve the final pressure characteristic.
- The connection flanges have knife-edge metal
seals enabling bake-out at up to 250ºC.
- The component materials have all been surface-processed
for ultra-high vacuums.
Applications
- As main evacuation pumps for ultra-high vacuum
equipment
(Used in combination with sputter ion pumps or turbomolecular
pumps.)
Specifications
| Model |
PGT-3F |
PGT-6F |
| Evacuation speed (*1) |
24m3/(Sm2)
<20ºC>/64m3/(Sm2) <-196ºC> |
| Operating pressure range |
Ultra-high vacuum of
between 10-1 to 10-9Pa |
| Gases that can be evacuated |
H2, N2,
O2, H2O, CO, CO2 |
| Gases that can't be evacuated |
He, Ne, Ar, CH4,
C2H6 and other organic gases |
| Leak volume |
1.3 x 10-11Pam3/s
max. |
| Maximum bake-out temperature |
250ºC |
| Required power |
270W |
| Filament material |
Titanium alloy |
| Filament life |
Rated continuous operation
time (*2) : About 75 hours/filament; Continuous ON
time : About 25 hours/filament |
| Number of filaments |
3 |
6 |
| Connection flange (*3) |
UFC070-FH |
UFC114-FH |
| Weight |
1.0kg |
2.5kg |
| Power supply model used with |
GGT-3 |
| *1 |
Calculated value for ultra-high vacuum pressure range,
20ºC, N2 |
| *2 |
ON for 30 seconds at 270 W, OFF for 60 seconds |
| *3 |
ULVAC standard stainless steel knife-edge metal seal
flanges |
Click here to
download the PDF file.
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
