 Oil
Rotary Vacuum Pumps
YM-VD, YM-VS Series Evacuation
Systems
(1,580 to 20,000 l/min)
ULVAC's mechanical booster pump
evacuation systems include oil rotary vacuum pumps and mechanical
booster pumps on compact platforms, with connection piping
and control panels. They can be used for evacuation in production
or research facilities.
Applications
- Evaporation, sputtering, ion plating
- Vacuum packaging, vacuum adhesion/conveying,
vacuum forming, vacuum casting
- Vacuum heat treatment furnaces, sintering
furnaces, brazing furnaces
- Vacuum drying, freeze-drying, vacuum deairing
- Gas substitution/supply, vacuum insulation
- Leak test equipment, other
Specifications
| Item
Model |
YM-VD100C |
YM-VD300C |
YM-VS-600A |
| Pump combination |
Mechanical booster pump |
PMB-001C(M) |
PMB-003C(M) |
PRC-006A |
| Oil rotary vacuum pump |
VD301 |
VD401 |
VS1501 |
Maximum evacuation
speed
m3/h(L/min)
|
50Hz |
95(1580) |
250(4100) |
550(9200) |
| 60Hz |
115(1900) |
290(4800) |
660(11000) |
| Final pressure (Pa) (*1) |
4.0 x 10-1 |
6.7 x 10-1 |
Motor power
(kW) (number of poles) (*2)
|
Mechanical booster pump |
0.4(2) |
0.75(2) |
2.2(2) |
Oil rotary vacuum pump
|
1.5(4) |
5.5(4) |
Oil volume (*2)
(L) |
Mechanical booster pump |
0.35 |
0.7 |
1.5 |
| Standard oil |
ULVOIL R-4 |
| Oil rotary vacuum pump |
1.0 to 2.5 |
8.0 to 10.5 |
| Standard oil |
ULVOIL R-7 |
| Cooling water |
Cooling method |
Mechanical booster pump |
Air-cooled |
Water-cooled |
| Oil rotary vacuum pump |
Air-cooled |
Water-cooled |
Primary pressure/
outlet-inlet differential pressure (MPa) |
- |
<=0.3 (gauge pressure)/0.05 |
| Temperature (ºC) |
- |
5 to 30 |
| Flow rate (l/min) |
Air-cooled *3 |
4 |
| Intake size (JIS B 2290) |
VG50 |
VG80 |
| Vent size (JIS B 2290) |
VG40 |
G3 |
| Weight (kg) |
130 |
155 |
515 |
| Options |
| (1) |
Vacuum switch : Not needed for YM-VD-CM |
| (2) |
Vacuum breaker |
| (3) |
Oil mist trap: YM-VD only |
|
| Item
Model |
YM-VS-1201A |
YM-VS-1202A |
| Pump combination |
Mechanical booster pump |
PRC-012A |
PRC-012A |
| Oil rotary vacuum pump |
VS1501 |
VS2401 |
Maximum evacuation
speed
m3/h(L/min)
|
50Hz |
850(14200) |
1000(16700) |
| 60Hz |
1000(16700) |
1200(20000) |
| Final pressure (Pa) (*1) |
6.7 x 10-1 |
Motor power
(kW) (number of poles) (*2) |
Mechanical booster pump |
3.7(2) |
3.7(2) |
| Oil rotary vacuum pump |
5.5(4) |
7.5(4) |
Oil volume (*2)
(L) |
Mechanical booster pump |
1.5 |
1.9 |
| Standard oil |
ULVOIL R-4 |
| Oil rotary vacuum pump |
8.0 to 10.5 |
| Standard oil |
ULVOIL R-7 |
| Cooling water |
Cooling method |
Mechanical booster pump |
Water-cooled |
| Oil rotary vacuum pump |
Water-cooled |
Primary pressure/
outlet-inlet differential pressure (MPa) |
<=0.3(gauge pressure)/0.05 |
| Temperature (ºC) |
5 to 30 |
| Flow rate (l/min) |
4 |
5 |
| Intake size (JIS B 2290) |
VG100 |
| Vent size (JIS B 2290) |
G3 |
G4 |
| Weight (kg) |
550 |
630 |
| Options |
| (1) |
Vacuum switch: Not needed for YM-VD-CM |
| (2) |
Vacuum breaker |
| (3) |
Oil mist trap: YM-VD only |
|
| Note: |
This catalog uses SI measurement units. Conversion
to non-SI units is as follows:
Final pressure: 4.0 x 10-1/6.7 x 10-1Pa=3.0
x 10-3/5.0 x 10-3Torr
Cooling water pressure: 0.3/0.05MPa=3/0.5kgf/cm2 |
| *1 |
Measured by Pirani vacuum gauge. |
| *2 |
Other oil types are available. Contact ULVAC's Sales
Department. |
| *3 |
For continuous operation with intake pressures of
530 Pa or higher, use water-cooling
(2 l/min flow rate). |
Click here to
download the PDF file.
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
