Mechanical Booster Pumps
PRC-A Series Mechanical Booster
Pumps
 The
PRC-A Series are improved versions of ULVAC's long-used PMB-003C(M),
PMB-006C(M) and PMB-012C(M) models. They have the same evacuation
performance with lower noise and greater reliability, and
are ideal for use in the dust-sensitive environments required
for clean rooms for semiconductor and LC manufacturing processes.
The PRC-A Series are Roots pumps designed mainly for processes
requiring highly clean atmospheres. They can be used with
auxiliary pumps, to increase the evacuation speed in the 10
kPa to 1 Pa range.
Features
- No oil leakage outside pump.
Use of canned motors eliminates mechanical seals and completely
eliminates oil leakage outside pump. No contamination of
ambient environment.
- Low noise
Use of canned motors eliminates wind noise from air-cooling
fans for general-purpose motors, enabling low noise levels.
- Oil-free
No lubrication oil in casing chamber, enabling stable performance
for water vapor or solvent vapor.
- Outstanding corrosion resistance
Major components are Tufram®-processed, for high
surface hardness and outstanding corrosion resistance. Tufram®-processed
components reduce damage and corrosion inside pump.
- Atmospheric pressure driven model
is available (option), effective at reducing evacuation
time
Use of inverter enables operation with intake pressure starting
from atmospheric pressure. Can be started at same time as
rough evacuation pump, enabling faster evacuation than standard
types.
Specifications
| Model
Item |
PRC-003A |
PRC-006A |
PRC-012A |
Effective evacuation speed
(m3/h (l/min)) (*1)
|
50Hz |
330 |
520 |
930 |
| 60Hz |
330 |
630 |
1000 |
| Final pressure (Pa) (*2) |
6.7 x10-1 |
| Auxiliary pump |
LR/HR60 |
LR/HR90 |
LR/HR90 |
| Maximum intake pressure (Pa) (except
atmospheric pressure driven models) |
50Hz |
1.2 x 103 |
1.3 x 103 |
1.3 x 103 |
| 60Hz |
9.3 x 102 |
1.1 x 103 |
1.1 x 103 |
| Maximum permitted pressure difference
(Pa) (except atmospheric pressure driven models) |
50Hz |
4.0 x 103 |
7.3 x 103 |
7.3 x 103 |
| 60Hz |
3.3 x 103 |
6.0 x 103 |
6.0 x 103 |
| Supported drive pressure (Pa) |
Up to 1.0 x 105
(atmospheric pressure driven models only) |
| Motor power (kW) (number of poles) (*3) |
0.75(2) |
2.2(2) |
3.7(2) |
| Oil (*4) |
ULVOIL R-4 |
| Required oil amount (l) |
0.7 |
1.5 |
1.9 |
| Cooling water |
Cooling method |
Water-cooled |
| Primary pressure (MPa) |
0.1 to 0.3 |
| Outlet/inlet differential pressure
(MPa) |
0.1< |
| Flow rate (l/min) |
2.0< |
3.0< |
| Temperature (ºC) |
5 to 30 |
| Intake size (JIS B 2290) |
VG80 size |
VG100 size |
| Vent size (JIS B 2290) |
VF80 size |
| External dimensions (L x W x H) (*5) |
296 x 565 x 260 |
356 x 619 x 320 |
406 x 759 x 340 |
| External dimensions of atmospheric pressure
driven models |
296 x 651 x 260 |
366 x 740 x 20 |
426 x 911 x 340 |
| Weight (kg) (*6) |
51(54) |
86(90) |
118(123) |
| Note : |
This catalog uses SI measurement units. Conversion
to non-SI units is as follows :
Final pressure : 6.7 x 10-1 Pa = 5.0 x
10-3 torr
Pressure : 0.1/0.2/0.3 MPa = 1/2/3 kgf/cm2 |
| *1 |
Measured value at 13 Pa (Atmospheric pressure driven
model) |
| *2 |
Measured by Pirani vacuum gauge (standard auxiliary
pump and oil) |
| *3 |
200 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase |
| *4 |
When ordering oil, specify the type. Pump oil types
other than the standard type are available. Contact
ULVAC. |
| *5 |
W = width, D = depth, H = height |
| *6 |
Oil volume values in parentheses ( ) : For atmospheric
pressure driven models |
| * |
Not available as explosion-proof type or increased
safety type. |
Click
here to download the PDF file for specifications.
Click
here to download the PDF file for dimensional drawings.
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
