Mechanical Booster Pumps
PMB-B/C Series Mechanical Booster
Pumps
 By
using them together with dry pumps, oil rotary vacuum pumps
or water-sealed pumps, mechanical booster pumps can increase
the evacuation speed in the 1 kPa to 0.1 Pa range, where rough
pump evacuation speed drops. The models in the PRC-A Series
are the successors to ULVAC's PMB-006C(M), and PMB-012C(M)
models. Like the PMB-C(M) Series, they are Roots pumps designed
for general-purpose applications, as well as semiconductor
and LC manufacturing processes that require a highly clean
atmosphere inside and outside the pump. The PMB-C Series is
ideal for general-purpose applications and clean applications.
The PMB-B Series is ideal for large-capacity evacuation, such
as for heat treatment furnaces and melting furnaces.
Features
- Oil filter
No lubrication oil in casing chamber, enabling stable performance
for water vapor or solvent vapor.
- Corrosion resistance
Major components are Tufram®-processed,
for high surface hardness and outstanding corrosion resistance.
Tufram®-processed components reduce damage and
corrosion inside pump. (Tufram® process is used
on PRC-A Series and PMB-C(M) Series.)
- PMB-CM/PRC-A (effective at achieving faster
evacuation) can be started at same time as rough pump driven
by atmospheric pressure, enabling faster evacuation than
standard type.
- Evacuation direction
can be selected (PMB-024C(M), 040B, 060B).
Vertical or horizontal evacuation direction can be selected,
for more compact systems with greater design freedom.
Specifications
| model
Item |
PMB-001C,CM |
PMB-003C,CM |
PRC-003A |
PRC-006A |
| Effective evacuation speed (m3/h(L/min))
(*1) |
50Hz |
95
(1580) |
280
(4670) |
280
(4670)
|
500
(8330) |
| 60Hz |
115
(1920) |
330
(5500) |
330
(5500) |
600
(10000) |
Maximum intake pressure
(Pa; PMB-C only)(*2) |
50Hz |
9.3 x 103 |
1.2 x 103 |
1.3 x 103 |
| 60Hz |
7.3 x 103 |
9.3 x 103 |
1.1 x 103 |
| Maximum permitted pressure difference
(Pa; PMB-C only)(*2) |
50Hz |
8.0 x 103 |
4.0 x 103 |
7.3 x 103 |
| 60Hz |
6.7 x 103 |
3.3 x 103 |
6.0 x 103 |
| Final pressure (Pa) (*3) |
4.0 x 10-1 |
| Supported drive pressure (Pa) (*4) |
to 1.0 x 105 (PRC-A,PMB-CM) |
Motor power (kW)
(number of poles) (*5) |
0.4(2) |
0.75(2) |
2.2(2) |
| Oil (*6) |
ULVOIL R-4 |
| Required oil amount (L) (*7) |
0.35 |
0.7 |
1.5 |
| Cooling water |
Cooling method |
Air-cooled |
Air-cooled, water-cooled |
Water-cooled |
| Primary pressure (MPa) |
- |
0.3 |
| Outlet/inlet differential pressure
(MPa) |
- |
0.05 |
0.01 |
| Flow rate (l/min) |
- |
2 |
| Temperature (ºC) |
- |
5 to 30 |
| Intake size (JIS B 2290) |
VG50 size |
VG80 size |
VG100 size |
| Vent size (JIS B 2290) |
VF50 size |
VF80 size |
| External dimensions (L x W x H; mm) |
217 x 529 x 180 |
290 x 656 x 260 |
296 x 565 x 260 |
356 x 619 x 320 |
| Weight (kg) (*8) |
22(23) |
46(48) |
51(54) |
86(90) |
| Standard auxiliary pump |
EC403 |
EC603 |
EC803 |
| Options |
- |
1.5 kW motors (2) |
Atmospheric pressure drive
type |
| Lubrication chamber evacuation
support |
| Model
Item |
PRC-012A |
PMB-024C,CM |
PMB-040B |
PMB-060B |
Effective evacuation speed
(m3/h (l/min)) (*1) |
50Hz |
1000
(16700) |
2000
(33300) |
3800
(63300) |
6200
(103300) |
| 60Hz |
1200
(20000) |
2400
(40000) |
Maximum intake pressure
(Pa; PMB-C only) (*2) |
50Hz |
1.3 x 103 |
8.0 x 102 |
1.3 x 103
(5 minutes or less at startup)
8.0 x 102
(during continuous operation) |
| 60Hz |
1.1 x 103 |
6.7 x 102 |
| Maximum permitted pressure difference
(Pa; PMB-C only) (*2) |
50Hz |
7.3 x 103 |
5.6 x 103 |
- |
- |
| 60Hz |
6.0 x 103 |
4.7 x 103 |
| Final pressure (Pa) (*3) |
6.7 x 10-1 |
| Supported drive pressure (Pa) (*4) |
to 1.0 x 105 (PRC-A,PMB-CM) |
| Motor power (kW) (number of poles) (*5) |
3.7(2) |
7.5(2) |
15(4) |
18.5(4) |
| Oil (*6) |
ULVOIL R-4 |
| Required oil amount (L) (*7) |
1.9 |
4.5(2.8) |
6.5 |
| Cooling water |
Cooling method |
Water-cooled |
| Primary pressure (MPa) |
0.3 |
0.1 to 0.2 |
| Outlet/inlet differential pressure
(MPa) |
0.01 |
0.05 |
| Flow rate (l/min) |
3 |
24 |
| Temperature (ºC) |
5 to 30 |
| Intake size (JIS B 2290) |
VG100 size |
VG200 size |
VG250 size |
VG300 size |
| Vent size (JIS B 2290) |
VF80 size |
VF200 size |
VF150 size |
VF200 size |
| External dimensions (L x W x H; mm) |
406 x 759 x 340 |
540 x 1237 x 470 |
764 x 1230 x 707 |
764 x 1470 x 707 |
| Weight (kg) (*8) (*9) |
118(123) |
260(272) |
950
(without motor) |
1150
(without motor) |
| Standard auxiliary pump |
VS1501 |
PKS-070 |
PKS-070 x 2 |
| Options |
Atmospheric pressure drive type |
11 kW motors (2) |
Bypass valve, piping |
| Lubrication chamber evacuation
support |
- |
- |
| Note : |
This catalog uses SI measurement units. Conversion
to non-SI units is as follows :
Final pressure : 4.0 x 10-1 Pa = 3.0 x 10-3
torr
Pressure: 0.05/0.1/0.2/0.3 MPa = 0.5/1/2/3 kgf/cm2 |
| *1 |
Measured value at 13 Pa |
| *2 |
With optional large-capacity motor, the intake pressure
and pressure difference can be increased. |
| *3 |
Measured by Pirani vacuum gauge (standard auxiliary
pump and oil).
4.0 x 10-2 Pa with MacLeod vacuum gauge
|
| *4 |
For PMB-024CM, set the repeated evacuation time for
air/vacuum (›655 Pa) to no more than 5 minutes, and
the interval to the next evacuation process to at least
5 minutes. |
| *5 |
200 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase |
| *6 |
Pump oil types other than the standard type are available.
Contact ULVAC. |
| *7 |
Oil volume values in parentheses ( ): For models performing
evacuation in horizontal direction |
| *8 |
W = width, D = depth, H = height |
| *9 |
Weight values in parentheses ( ): Values for CM models |
|
PRC Series models are not available as explosion-proof
types or increased safety types. |
Click
here to download the PDF file for specifications.
Click
here to download the PDF file for dimensional drawings.
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
