 Ion
Pumps
PST-200CX2/200AX2 Acter Pumps
Sputter ion pumps are one type of
pump used to create ultra-high vacuums, and are used in many
analyzers and accelerators. ULVAC's acter pumps were developed
to enable single sputter ion pumps to create ultra-high and
extremely high vacuums on the order of 10-10 Pa.
They are designed for developing new elements (acter elements)
with improved evacuation characteristics at ultra-high and
extremely high vacuums, and to optimize magnetic fields.
Features
- Ultimate pressure in the 10-9 Pa
region (achieved with test dome complying with ISO standards)
- Double the pumping performance achieved by
the inert gas enhanced pumping model (type AX2)
(compared with the ULVAC's conventional pumps)
- High pumping speed attained in the ultra-high
vacuum region
- Pumping down to ultra-high vacuum in a short
period of time
- Top-notch pumping characteristics in ultra
and extremely-high vacuum region
(discharging maintained down to the ultra-high vacuum region)
Applications
- Accelerators
- Electron microscopes
- Analyzers
Specifications
Evacuation speed to 1 x 10-7 Pa
(reproduced evacuation speed) |
| N2: |
0.20m3/s(CX2 · AX2) |
| Ar: |
0.02m3/s(CX2)
0.105m3/s(AX2) |
|
| Final pressure |
10-10Pa order |
| Operation pressure |
<4.0 x 10-3Pa (recommended
value)
(Maximum operation pressure : 1.3 x 10-2Pa)
*(Using GST-03L controller) |
| Volume |
0.011m3 approx. |
| Number of pump elements |
CX2 cells (x 2), AX2 cells (x 2) |
| Connection flange model |
UFC203 |
| Applied voltage |
DC+7.5kV |
| Standard bake-out temperature |
250°C(heat resistance temperature : 350°C) |
| Weight |
65kg approx.(with heater, cover) |
| External dimensions (W x D x H) |
296 x 361 x 376 mm |
| Power required by heater unit |
Single-phase 200 V, 600 W approx. |
Click here to
download the PDF file.
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
