Ion Pumps 

PST-100CX/100AX Acter Pumps

Sputter ion pumps are one type of pump used to create ultra-high vacuums, and are used in many analyzers and accelerators. ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuums, and to optimize magnetic fields.

Features

• Ultimate pressure in the 10^-9 Pa region (achieved with test dome complying with ISO standards)
• Double the pumping performance achieved by the inert gas enhanced pumping model (type AX2)
  (compared with the ULVAC's conventional pumps)
• High pumping speed attained in the ultra-high vacuum region
• Pumping down to ultra-high vacuum in a short period of time
• Top-notch pumping characteristics in ultra and extremely-high vacuum region
  (discharging maintained down to the ultra-high vacuum region)

Applications

• Accelerators
• Electron microscopes
• Analyzers

Specifications

Evacuation speed to 1 x 10-7 Pa (reproduced evacuation speed)	N2: 0.10m3/s(CX · AX) 0.08m3/s(at 1 x 10-7Pa)
Final pressure	10-9Pa order
Operation pressure	<5.0 x 10-3Pa (recommended value) (Maximum operation pressure : 1 x 10-2Pa) *(Using GST-03L controller)
Volume	3.3 x 10-3m3 approx.
Number of pump elements	CX2 cell (x 1), AX2 cell (x 1)
Connection flange model	UFC152
Applied voltage	DC+7.5kV
Standard bake-out temperature	250°C(heat resistance temperature : 350°C)
Weight	37 kg approx. (with heater)
External dimensions (W x D x H)	330.4 x 151.6 x 337.5 mm
Power required by heater unit	Single-phase 200 V, 320 W approx.

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