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   ULVAC Technologies, Inc.
   401 Griffin Brook Drive
   Methuen, MA 01844

   Tel: 978-686-7550
   Fax: 978-689-6300


 Ion Pumps 

PST-050CU/AU Acter Pumps

Sputter ion pumps are one type of pump used to create ultra-high vacuums, and are used in many analyzers and accelerators. ULVAC's acter pumps were developed to enable single sputter ion pumps to create ultra-high vacuums on the order of 10-10 Pa. They are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuums, and to optimize magnetic fields.

Features

  • Ultimate pressure in the 10-9 Pa region (achieved with test dome complying with ISO standards)
  • Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
    (compared with the ULVAC's conventional pumps)
  • High pumping speed attained in the ultra-high vacuum region
  • Pumping down to ultra-high vacuum in a short period of time
  • Top-notch pumping characteristics in ultra and extremely-high vacuum region
    (discharging maintained down to the ultra-high vacuum region)

Applications

  • Accelerators
  • Electron microscopes
  • Analyzers

Specifications

Evacuation speed to 1 x 10-7 Pa
(reproduced evacuation speed)
N2: 0.045m3/s(CU · AU)
0.03m3/s(at 1x10-7Pa)
Final pressure 10-9Pa order
Operation pressure <8.0 x 10-3Pa (recommended value)
(Maximum operation pressure : 1 x 10-2Pa)
*(Using GST-03L controller)
Volume 1.37 X 10-3m3 approx.
Number of pump elements CX cell (x 1), AX cell (x 1)
Connection flange model UFC114
Applied voltage DC+7.5kV
Standard bake-out temperature 250°C(heat resistance temperature : 350°C)
Weight 12.8 kg approx. (with heater)
External dimensions (W x D x H) 200 x 163 x 240.5 mm
Power required by heater unit Single-phase 200 V, 160 W approx.

Click here to download the PDF file.



For more information
Please Email Us
TEL : 978-686-7550/ FAX : 978-689-6300

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