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ULVAC Technologies, Inc.
401 Griffin Brook Drive
Methuen, MA 01844
Tel: 978-686-7550
Fax: 978-689-6300 |
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 Ion
Pumps
PST-030CU/AU Acter Pumps
Sputter ion pumps are one type of
pump used to create ultra-high vacuums, and are used in many
analyzers and accelerators. ULVAC's acter pumps are designed
for developing new elements (acter elements) with improved
evacuation characteristics at ultra-high and extremely high
vacuums, and to optimize magnetic fields.
Features
- Ultimate pressure in the 10-9 Pa
region (achieved with test dome complying with ISO standards)
- Double the pumping performance achieved by
the inert gas enhanced pumping model (type AU)
(compared with the ULVAC's conventional pumps)
- High pumping speed attained in the ultra-high
vacuum region
- Pumping down to ultra-high vacuum in a short
period of time
- Top-notch pumping characteristics in ultra
and extremely-high vacuum region
(discharging maintained down to the ultra-high vacuum region)
Applications
- Accelerators
- Electron microscopes
- Analyzers
Specifications
Evacuation speed to 1 x 10-7 Pa
(reproduced evacuation speed) |
| N2: |
0.03m3/s(CU · AU) |
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0.02m3/s(at 1x10-7Pa) |
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| Final pressure |
10-9Pa order |
| Operation pressure |
<8.0 x 10-3Pa (recommended value)
(Maximum operation pressure : 1 x 10-2Pa)
*(Using GST-03L controller) |
| Volume |
6.7 X 10-4m3 approx. |
| Number of pump elements |
CX cell (x 1), AX cell (x 1) |
| Connection flange model |
UFC070 |
| Applied voltage |
DC+7.5kV |
| Standard bake-out temperature |
250°C(heat resistance temperature : 350°C) |
| Weight |
9.5 kg approx. |
| External dimensions (W x D x H) |
183 x 103 x 187 mm |
Click here to
download the PDF file.
For
more information |
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TEL
: 978-686-7550/ FAX : 978-689-6300 |
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