Dry Pumps
 LR/HR
Series
Effective utilization of compressed
heat which is own high temperature uniformity technology has
given this dry pump series a high durability in the hard processes
of CVD, etching etc.
In the light processes, approximately up to 70% of electric
power consumption cuts is possible by having the ECHO-SHOCK
on the pump. CE marking is available for all series (optional).
Features
- LR series: Uniformity of low temperature distribution.
The optimum pump for the evacuation of LL chamber, in addition
to the PVD processes, in which reduction of exhaust time
is important to up the throughput.
- HR series: Uniformity of high temperature
distribution. It is possible to exhaust the sublimates generated
by CVD and etching processes in a gaseous state.
- Noise reduction PDR-180C: 74dB → LR180:
68.5dB
- Pump withstands power interruptions of up
to 500ms duration.
- CE marking is available upon request.
Applications
- Evacuation of activated gas (CVD and etching,
etc)
- Evacuation of inert gas (PVD, evaporation,
heat treatment processes, etc)
- Reduction of exhaust time for LL chamber LR
series
- Evacuation of gases on the process which generate
powders (Si crystal growing furnaces, etc)
- Backing pump for turbo-molecular pumps and
mechanical booster pumps, etc
Specifications
| Model/Spec |
LR/HR
60 |
LR/HR
90 |
LR
180 |
LR/HR
300 |
LR/HR
600 |
LR/HR
1200 |
LR
1800 |
| Booster Pump |
- |
PRC-003A |
PRC-006A |
PRC-012A |
PRC-018A |
| Dry Pump |
LR/HR60 |
LR/HR90 |
LR180 |
LR/HR60 |
LR/HR90 |
LR/HR90 |
LR180 |
Maximum pumping speed
m3/hr
(L/min) |
50Hz |
62
(1030) |
112
(1860) |
183
(3100) |
359
(5980) |
653
(10900) |
1012
(16900) |
1701
(28350) |
| 60Hz |
80
(1333) |
126
(2100) |
237
(3950) |
365
(6080) |
701
(11700) |
1051
(17500) |
1784
(29700) |
| Maximum inlet pressure (Pa) |
Atmospheric pressure *2 |
| Ultimate pressure (Pa) |
5 |
0.67 |
| Maximum exhaust pressure |
1Pa to Atmospheric pressure |
| Inlet diameter *1 |
VG 50 |
VG 80 |
VG 80 |
VG 80 |
VG 80 |
VG 100 |
VG 160 |
| Outlet diameter |
NW40 |
| Lubricating oil, Grease |
PRC |
- |
FOMBLIN YL VAC 14/6
BARRIERTA J60F |
| - |
- |
- |
0.7L |
1.5L |
1.9L |
1.9L |
| LR/HR |
FORBLIN YL VAC 25/6
BARIERTA J100F |
| 0.5L |
0.9L |
1.5L |
0.5L |
0.9L |
0.9L |
1.5L |
| BARIERTA JFE552HV |
| 23.8g |
30.0g |
37.4g |
23.8g |
30.0g |
30.0g |
37.4g |
| Weight (kg) |
180kg |
245kg |
335kg |
275kg |
370kg |
420kg |
545kg |
*1:
With the HR300,HR600 and HR1200,do not allow the repeated
pumping operation at the suction pressure more than 200Pa.
There is possibility pump temperature
will exceed the upper limit of the setting point and the interlock
will run.
*2:
The standard suction port flange is JIS flanging flange will
be suction port flange in the case of CE marking. NW
flange is available as the option even CE marking is not required.
Utility Requirements
| Power |
Spec |
AC200V 50/60Hz, AC220V 60Hz
3phase |
| Model |
LR/HR
60 |
LR/HR
90 |
LR
180 |
LR/HR
300 |
LR/HR
600 |
LR/HR
1200 |
LR
1800 |
Motor power
(kW) |
Booster Pump |
- |
- |
- |
0.75 |
2.2 |
3.7 |
5.5 |
| Dry pump |
2.2 |
3.7 |
5.5 |
2.2 |
3.7 |
3.7 |
5.5 |
Breaker
(A) |
Booster Pump |
- |
- |
- |
7 |
16 |
25 |
32 |
| Dry pump |
16 |
25 |
32 |
16 |
25 |
25 |
32 |
Current
(A) |
at maximum load |
7.0/7.3 |
11.8 |
20.6 |
9.6/8.1 |
19.0/13.8 |
24.2-18.9 |
39.8 |
| at ultimate vacuum pressure. |
6.9/7.1 |
11.2 |
18.9 |
7.0/7.8 |
12.3/12.9 |
13.7/15.4 |
21.4 |
| Cooling water |
Supply pressure (Mpa) |
0.1 to 0.3 MPa |
| In/out difference
pressure (Mpa) |
0.1 MPa < |
| Flow rate (L/min) |
5.0 L/min < |
Supply water temperature
(°C) |
10 to 30°C *1) |
| Nitrogen gas |
Supply pressure (Mpa
gauge pressure) |
0.1 to 0.5 MPa |
| Regulated pressure
(Mpa gauge pressure) |
0.05 MPa (Regulated pressure
in pump) |
| Flow rate(SLM) |
Shaft seal |
5 SLM |
| Gas ballast |
0 to 45 SLM |
*1:Not condensing.
Comparison Chart LR/HR
| Model |
LR |
HR |
| Temperature of pump inside |
Uniform temperatures at low temperature |
Uniform temperatures at high tempperature |
| Coarting |
TUFRAM(TM) coarting |
| Heating kit for rear pipe for chemical
corrosion |
nothing |
standard euipment |
Click here to
download the PDF file.
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
