 Dry
Pumps
ER Series Energy-Saving Dry Pumps
The ER Series is the latest addition
to ULVAC's PDR-C Series, popular for SiN-LPCVD, metal etching
and other harsh processes generating sublimated substances.
The ER Series is for process applications such as sputter,
ashing, and etching requiring corrosion resistance. The ER
Series are the most energy-saving models in the industry,
using brushless DC motors and optimizing the capacity of each
evacuation stage.
Features
- Power consumption : Up to 58% lower than previous
ULVAC models
- N2 consumption reduction : Can
be operated with OSLM N2 purge
(for clean evacuation applications).
- Outstanding corrosion resistance
Applications
- CVD and etching with no generation of sublimated
substances
- Sputter and loading / unloading chambers
- Turbomolecular pump and other auxiliary evacuation
pumps
Specifications
| Model/specification |
ER80 |
ER150 |
ER400 |
ER600 |
ER1200 |
| Effective maximum evacuation
speed |
(m3/h) |
80 |
150 |
390 |
600 |
1140 |
| (L/min) |
1330 |
2500 |
6500 |
10000 |
19000 |
| Final pressure (Pa) (*1) |
2 |
0.67 |
| Cooling water |
Connection port |
Rc3 8, internal thread |
| Pressure |
Differential pressure : 0.1
MPa;
Supply pressure : 0.1 to 0.5 MPa |
| Flow rate |
3 L/min min. |
| Temperature |
10 to 30ºC |
| Nitrogen |
Connection port |
1/4-inch tube coupling (Swagelok
type)
Connectable tube : 6.35 mm outer diameter |
| Pressure (gauge
pressure) |
Supply pressure : 0.1 to 0.5
MPa;
Regulator set pressure : 0.05 to 0.1 MPa |
N2
purge gas |
0 to 50 SLM |
| Phase, voltage (frequency) |
3-phase, 200 VAC (50/60 Hz)
; 220 VAC (60 Hz) |
Rated current
(A)
(at final pressure) |
7.2 |
10.0 |
16.7 |
19.2 |
24.5 |
| (4.0) |
(6.0) |
(6.0) |
(9.4) |
(11.4) |
| Intake size |
NW40 |
NW50 |
NW80 |
NW100 |
| Vent size |
NW40 |
External dimensions
(W x D x H; mm) (*3) |
873 x 383 x 490 |
923 x 383 x 490 |
873 x 383 x 768 |
873 x 383 x 828 |
923 x 423 x 856 |
| Weight (kg) |
167 |
172 |
230 |
265 |
305 |
| Power consumption at final
pressure (kW) |
1.26 |
1.4 |
1.6 |
1.8 |
2.1 |
| Noise value (dB(A)) |
57 |
57 |
58 |
59 |
59 |
Click
here to download the PDF file.
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
