 Dry
Pumps
Eco-Shock Power-Saving Attachment
Eco-Shock is a groundbreaking attachment
that can be attached to your existing dry pumps to achieve
great savings in dry pump power consumption.
Winner
of the Third Japan Vacuum Industry Association/Japan Industrial
Journal Chairman's Award for 2003
Winner
of Chairman's Award, Japan Machinery Federation's 23rd Award
for Outstanding Environmental Machinery
Features
- Greatly reduces dry pump power consumption.
- No drop in evacuation speed at full pressure
- Simple installation
Applications
- Dry pumps used to evacuate inert gases such
as air, nitrogen or argon.
- Dry pumps used with sputter or loading / unloading
chambers.
Specifications
| Model |
ES10 |
| Power supply |
Voltage, frequency, phase |
100 to 220
VAC, 50 / 60 Hz, single-phase
(switched automatically) |
| Power consumption |
| Control |
Input |
• Remote start / stop (24 VDC contact
with voltage)
• Non-voltage contact with contact capacity of
2.0 A min. required
• CLOSE : Start; OPEN : Stop |
| Output |
Overcurrent alarm output
(non-voltage contact)
Contact capacity : 24 VDC, 1.0 A |
| Operation |
Manual start switch |
| Display |
Display of
operation time |
| Appearance |
Dimensions |
Eco-Shock : 175 x 310
x 240 mm
Valve unit : 66 (diameter) x 110 mm (NW40) |
| Weight |
Eco-Shock : 8.3 kg; Valve
unit : 800 g |
| Connection |
Connection port |
G1/4" (INLET , OUTLET) |
| Recommended
piping |
Diameter :
6.53 mm min. ; Length : 3 m max. |
| Manufacturer |
ULVAC |
| Model |
LR60 |
LR90 |
LR180 |
ER80 |
ER150 |
| Evacuation speed (L/min) (*1) |
1300 |
2100 |
3980 |
1300 |
2500 |
| Measured power consumption (kW) (*2) |
2.1 |
3.6 |
6.6 |
1.3 |
1.5 |
| Measured power consumption with Eco-Shock
attached (kW) (*2, *3) |
0.7 |
1.0 |
1.6 |
0.3 |
0.3 |
| Power reduction rate |
69% |
72% |
76% |
77% |
80% |
Click
here to download the PDF file.
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
