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ULVAC Technologies, Inc.
401 Griffin Brook Drive
Methuen, MA 01844
Tel: 978-686-7550
Fax: 978-689-6300 |
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 Oil
Diffusion Pumps
ULK Series Oil Diffusion Pumps
ULVAC has drawn on a wealth of experience
in evacuation technology to redesign the ULK Series of oil
diffusion pumps to meet the demands of a new era. These pumps
have been designed for outstanding performance and extremely
low running costs.
Features
- Designed for large critical back-pressure
- Extremely stable performance at pressures
down to 10-2 Pa (10-4 torr) etc.
- Use hose flanges (except for vent flanges
on ULK-04A and 06A)
- Pumps can be cleaned easily (parts can be
disassembled easily).
- Come with mechanism to stop flow of operating
fluid to auxiliary pump.
Specifications
| Model
Specification |
ULK-04A |
ULK-06A |
| Operating fluid |
ULVOIL
D-11 |
ULVOIL
D-31 |
ULVOIL D-11 |
ULVOIL D-31 |
| Funal pressure |
Pa |
<2.6 x 10-5 |
<2.6 x 10-6 |
<2.6 x 10-5 |
<2.6 x 10-6 |
| Critical back-pressure |
Pa |
40 |
60 |
40 |
60 |
| Evacuation speed |
L/s |
550 |
500 |
1200 |
1100 |
| Maximum evacuation capacity |
Pa·m3/s |
0.086 |
0.13 |
0.15 |
0.20 |
| Operation startup time |
min |
9.0 |
8.5 |
16.5 |
15 |
| Required power (*1) |
KW |
0.55 |
0.73 |
0.90 |
1.2 |
| Operating fluid volume |
L |
0.15 |
0.15 |
0.35 |
0.35 |
| Cooling water flow rate (*2) |
L/min |
1.0 |
1.0 |
1.0 |
1.5 |
| Auxiliary pump |
D-330K, D-240DK,
PVD-180 |
D-950K, D-650K, D-330K, VD-301,
VD401 |
| Model
Specification |
ULK-10A |
ULK-14A |
| Operating fluid |
ULVOIL D-11 |
ULVOIL D-31 |
ULVOIL
D-11 |
ULVOIL
D-31 |
| Final pressure |
Pa |
<2.6 x 10-5 |
<2.6 x 10-6 |
<2.6 x 10-5 |
<2.6 x 10-6 |
| Critical back-pressure |
Pa |
35 |
40 |
31 |
40 |
| Evacuation speed |
L/s |
3400 |
3000 |
5400 |
4900 |
| Maximum evacuation capacity |
Pa·m3/s |
0.35 |
0.43 |
0.35 |
0.47 |
| Operation startup time |
min |
20 |
20 |
24 |
25 |
| Required power (*1) |
KW |
2.0 |
2.4 |
2.25 |
3.15 |
| Operating fluid volume |
L |
0.8 |
0.8 |
1.5 |
1.5 |
| Cooling water flow rate (*2) |
L/min |
2.5 |
3.0 |
2.5 |
3.5 |
| Auxiliary pump |
VS1501, PKS-030, PKS-016, EC803 |
VS1501, VS2401, PKS-030 |
| *1 |
Specify the supply voltage when ordering. |
| *2 |
Cooling water temperature : 19ºC (inlet), 29ºC (outlet) |
| Model
Specification |
ULK-04A |
ULK-06A |
ULK-10A |
ULK-14A |
| External dimensions |
A (mm) |
175 |
250 |
340 |
340 |
| B (mm) |
150 |
180 |
240 |
240 |
| H (mm) |
341 |
449 |
650 |
670 |
| Intake |
Flange type |
VG100 size |
VG150 size |
VG250 size |
VG350 size |
| Outer diameter (mm) |
185 |
235 |
350 |
450 |
| Bolt holes (number-diameter) (mm) |
8-12 (diameter) |
8-12 (diameter) |
12-15 (diameter) |
12-15 (diameter) |
| P.C.D (mm) |
160 |
210 |
320 |
420 |
Gasket groove dimensions (mm)
(inner diameter x width x depth) |
120 x 4 x 3 |
175 x 4 x 3 |
275 x 7.5 x 4.2 |
380 x 7.5 x 4.2 |
Gasket dimensions* (mm)
(inner diameter x width x depth) |
120 x 4 x 4 |
175 x 4 x 4 |
275 x 8 x 8 |
380 x 8 x 8 |
| Vent |
Flange type |
VG25 size |
VG40 size |
VG80 size |
VG80 size |
| Outer diameter (mm) |
90 |
105 |
160 |
160 |
| Bolt holes (number-diameter) (mm) |
4-10 (diameter) |
4-10 (diameter) |
4-12
(diameter) |
4-12
(diameter) |
| P.C.D (mm) |
70 |
85 |
135 |
135 |
Gasket groove dimensions (mm)
(inner diameter x width x depth) |
40 x 5 x 3 |
55 x 5 x 3 |
100 x 5 x 2.8 |
100 x 5 x 2.8 |
Gasket dimensions* (mm)
(inner diameter x width x depth)
|
V40 |
V55 |
V100 |
V100 |
| Cooling water hose opening |
Rc1/4
(PT1/4) |
Rc1/4
(PT1/4) |
Rc3/8
(PT3/8) |
Rc3/8
(PT3/8) |
| Material |
Pump case |
SUS |
| Nozzle |
Al |
| Cooling method |
Water-cooled by coil hose |
| Oil level gauge |
No |
No |
Available as option |
Yes |
| Weight (kg) |
7.5 |
13.5 |
47 |
56 |
| Packaging dimensions (H x D x W) (mm) |
550 x 330 x 400 |
580 x 420 x 580 |
730 x 550 x 700 |
750 x 550 x 700 |
| Packaging weight (kg) |
10.5 |
17.5 |
54 |
64 |
| * |
NBR intake/vent gaskets are provided as standard accessories.
If pressures under 10-5 Pa (10-7
torr) will be required, specify fluororubber gaskets. |
Click here to
download the PDF file.
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
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