Dry Pumps
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Pumping Speeds of 47 - 1,050 CFM |
The LR/HR Series Dry Pumps effectively use the heat generated in the gas compression stage to prevent vapors from condensing in the pump. Allowing the pump to perform reliably in CVD, Etch and other harsh processes. |
Eco-Shock is a groundbreaking attachment that can be attached to your existing dry pumps to achieve greater savings in dry pump power consumption.
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Pumping Speeds of 47 - 670 CFM
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The ER Series of Dry Pumps are ideal for LPCVD and other harsh processes requiring corrosion resistance. Power consumption in the ER Pumps has been reduced by 58% making them the most energy efficient dry pump on the market today. |
Scroll Pumps |
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Pumping Speeds of 3.8 - 18 CFM |
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Diaphragm Pumps |
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Pumping Speeds of
6 - 7 L/min
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Pumping Speeds of 24 - 72 L/min
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Pumping Speeds of 24 - 140 L/min
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Rocking Piston Pumps |
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Pumping Speeds of 9.8 - 330 L/min
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