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ULVAC Technologies, Inc.
401 Griffin Brook Drive
Methuen, MA 01844
Tel: 978-686-7550
Fax: 978-689-6300 |
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Residual Gas Analyzers
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Low cost RGA, Qulee BGM-101L
Price starting at $4,000 the BGM-101L is your answer to cost effective leak detection, RGA, and process gas monitoring in vacuum systems.
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Qulee BGM-R series
The BGM-R series integrates measurement display and control electronics, eliminating the need for PC operation. One-touch control displays: (1) partial pressure read out in Torr, mbar or Pascal of He,
H2O, N2, O2, O2:N2 ratio and “any” selected gas in range of 1-100 and 200amu, as well as, total pressure. |
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Process Gas Monitors |
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Qulee CGM series
A maximum operation pressure of 15 mTorr can eliminate the need for a differential pumping system. Price is only half compared to other competitive models. |
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REPROS series Repros series with the closed ion source package is the best answer to your problem in the gas monitoring in Etch, CVD and other Reactive gas processes. |
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Ultra-High Vacuum Gas Analyzers |
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SEPION II Best RGA for ultra-high and extremely high vacuum. |
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