MILA-5000
 Rapid Thermal Processing (RTP) has become an important heating technique for annealing semiconductors, ferroelectrics and other thin film devices. But until recently, only large and expensive production systems were available for this rapid heating/cooling technique, making lab-scale R&D work difficult, especially on small samples. To address this need, ULVAC has developed the MILA-5000 Mini Lamp Annealer. This compact table top RTP system is built around a gold reflector IR furnace equipped with a high precision temperature controller. When combined with optional pumping and gas inlet equipment, the MILA-5000 is able to provide the same performance as larger production scale RTP units but on small lab samples at a fraction of the size and cost.
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Features
- Heat samples in any atmosphere
Vacuum, gas, gas flow or air can be selected as the heating atmosphere during heating and cooling. The sample is housed inside an o-ring sealed transparent quartz protective tube that maintains sample cleanliness.
- Observe the sample during the heating cycle
The sample can be observed through the optional top view port during heating. Changes in the sample during the heating cycle can be recorded on video by using the optional PC based video camera.
- Rapid heating and cooling
The maximum heating rate is 50°C/sec. This non-insulated cold-wall water-cooled optical IR reflector furnace has very little thermal inertia so it also cools rapidly during ramp downs or when powered off at the end of a run. Of course, slow controlled cooling ramps are also possible.
- Accurate temperature control
The built-in programmable temperature controller simultaneously displays the actual and the programmed set temperature as the program steps are executed automatically. Programming is straightforward by keystroke entry via the front panel, or via a PC with the included software and USB cable. PID parameter control of temperature ramps permit tight temperature control with little overshoot/undershoot over the wide temperature range from Room Temperature to 1,200°C.
Specifications:
|
MILA-5000-P-N |
MILA-5000-UHV |
MILA-5000-P-F |
Type |
Near-infrared lamp,
High temp. type |
Near-infrared lamp,
High temp. high vacuum type |
Far-infrared lamp,
Uniform heating type |
Temperature Range |
RT to 1200°C (MAX) |
RT to 1200°C (MAX) |
RT to 800°C (MAX) |
Maximum heating rate * |
50°C/sec (50~1200°C)
in vacuum atmosphere
45°C/sec (50 ~1200°C)
in nitrogen gas |
50°C/sec (50~1200°C)
in vacuum atmosphere
45°C/sec (50 ~1200°C)
in nitrogen gas |
4°C/sec (50~800°C)
in vacuum atmosphere
4°C/sec (50~800°C) in nitrogen gas |
Temperature uniformity * |
±2.0°C (DT=4°C)
at 1200°C in vacuum atmosphere
±4.5°C (DT=9°C)
at 1200°C in nitrogen gas |
±2.0°C (DT=4°C)
at 1200°C in vacuum atmosphere
±4.5°C (DT=9°C)
at 1200°C in nitrogen gas |
±1.8°C (DT=3.6°C) at 500°C in vacuum atmosphere
±1.2°C (DT=2.4°C) at 500°C in nitrogen gas |
Heating Atmosphere |
Air, vacuum or inert gas |
Air, vacuum or inert gas |
Air, vacuum or inert gas |
Sample size |
MAX.20W x 20L x 20T(mm) |
MAX.20W x 20L x 20T(mm) |
MAX.20W x 20L x 20T(mm) |
Temperature control sensor |
Compatible with JIS thermocouple K fixed |
Compatible with JIS thermocouple K fixed |
Compatible with JIS
thermocouple K fixed |
Lamp rating |
1Kw - 4 - 100V/lamp |
1Kw - 4 - 100V/lamp |
250w - 4 - 100V/lamp |
*The heating rate and temperature uniformity above are the measured values of a 0.5mm thick X 20mm deep 20mm wide Nickel plate. Subject to change depending on material and size.
Program mode |
Temperature vs. time setting, Step number 256, Total program: 32MAX
Cyclic, hold, advance and other function
PID + fuzzy control, Auto tuning, USB communication, AUTO/MANUAL available |
Temperature control sensor |
Compatible with K-type thermocouple |
Utility requirement |
MILA-5000-P-N |
MILA-5000-UHV |
MILA-5000-P-F |
Power requirement |
AC200V, single phase, 4Kw
Transformer to 240V available |
AC200V, single phase, 4Kw
Transformer to 240V available |
AC200V, single phase, 1Kw
Transformer to 240V available |
Cooling water |
Flow rate; 4L/min, pressure; 0.3 MPa |
Flow rate; 4L/min, pressure; 0.3 MPa |
Flow rate; 2L/min, pressure; 0.3 MPa |
Gas inlet port |
1/4inch Swagelock joint |
1/4inch Swagelock joint |
1/4inch Swagelock joint |
Gas discharge port |
1/4inch Swagelock joint |
Exhaust from Vacuum port |
1/4inch Swagelock joint |
Vacuum port |
NW25-KF |
ICF-70 |
NW25-KF |
Outside dimensions |
360W X 179H X 355D(mm)
(excluding protrusion) |
360W X 179H X 365D(mm)
(excluding protrusion) |
360W X 179H X 355D(mm)
(excluding protrusion) |
Weight |
Approx. 15Kg |
Approx. 15,5Kg |
Approx. 15Kg |
Standard safty features |
Thermocouple Burnout
Overtemperature setting
Furnace body temperature sensor |
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
