Mini Lamp Annealer
MILA-3000
As the density of semiconductor
becomes higher and its pattern becomes finer, Rapid Thermal
Processing (RTP) is attracting attention as an important heating
technique in the semiconductor fabrication process. The MILA-3000
has integrated excellent characteristics, such as capabilities
of rapid heating/cooling of the infrared gold image furnace,
high precision temperature control, clean heating and versatile
atmosphere selection, in a compact unit and features moderate
price, small size and high performance. It finds application
as a R&D tool in RTP for ferroelectrics which are expected
as the 21th century's memory, not to mention the wide range
of application in which it has found so far.
Features
- Capability of heating in any atmosphere
Vacuum, Gas, Gas flow or air can be selected as atmosphere
during heating and cooling because of the use of a transparent
quartz protective tube. (The vacuum pumping system and gas
flow unit are optional)
- Capability of observing sample during
heating
Sample can be observed through the top view port during
heating. Changes in sample during heating can be recorded
on Video by using the optional CCD camera system. Sample
can also be observed on the monitor included in CCD camera
system.
- Capability of rapid heating and cooling
The maximum heating rate is as high as 50deg°C/sec.
The heating furnace permits rapid cooling because it uses
no heat insulation and is cooled with water all the time.
- Capability of high accuracy temperature
control by simultaneous digital display of sample temperature
and programmed temperature
PID constants can be set easily by the standard auto tuning
function.
(With the manual type, only sample temperature is displayed)
Specifications
| |
MILA3000-P-N,
MILA3000-M-N |
MILA3000-P-F,
MILA3000-M-F |
| Type |
Near-infrared
lamp
(N) high temp. type |
Far-infrared
lamp (F)
Uniform heating type |
| Temperature Range |
RT
- 1200degC (MAX) |
RT - 800degC
(MAX)
|
| Maximum heating rate * |
50°C/sec
(50 - 1200°C)
in vacuum atmosphere |
4degC/sec (50-800°C)
in vacuum atmosphere
|
| Temperature uniformity * |
±2.0°C
(DT=4°C)
at 1200°C in vacuum atmosphere |
±1.8degC
(DT=3.6°C) at 500°C
in vacuum atmosphere
|
| Heating Atmosphere |
In
air, vacuum and inret gas |
In air, vacuum
and inret gas
|
| Sample size |
MAX.20W
x 20L x 20T(mm) |
MAX.20W x 20L
x 20T(mm) |
| Temperature control sensor |
Compatible
with JIS thermocouple K fixed |
Compatible with
JIS
thermocouple K fixed |
| Lamp rating |
1Kw
- 4 - 100V/pc
|
250w - 4 - 100V/pc |
*The heating rate and temperature uniformity
above are the measured values of a 0.5mm thick X 20mm deep
20mm wide Nickel plate. Subject to change depending on material
and size.
| Specification |
(for
program operation type only) |
| Program mode |
Temperature
vs. time setting
99steps/pattern, No.of patterns; Maximum 99
(The total number of steps is maximum 400)
Cyclic, hold, advance and other function
PID + fuzzy control, auto tuning
RS-232C communication function (front panel)
AUTO/MANUAL available |
| Temperature control sensor |
Compatible with
JIS thermocouple K fixed
|
| Utility requirement |
MILA3000-P-N,
MILA3000-M-N |
MILA3000-P-F,
MILA300-M-F |
| Power requirement |
AC200V,
single phase, 4Kw |
AC200V, single
phase, 1Kw |
| Cooling water |
Flow rate; 4L/min,
pressure; 3Kgf/cm2
(City water) |
Flow rate; 2L/min,
pressure; 3Kgf/cm2
(City water) |
| Gas inlet port |
1/4inch Swagelock
joint |
1/4inch Swagelock
joint |
| Gas discharge port |
1/4inch Swagelock
joint |
1/4inch Swagelock
joint |
| Vacuum port |
NW-16 |
NW-16 |
| Outside dimensions |
360W X 179H X
307D(mm)
(excluding protrusion) |
360W X 179H X
307D(mm)
(excluding protrusion) |
| Weight |
Approx. 15Kg |
Approx. 15Kg |
| Standard safty features |
Thermocouple
Burnout
Overtemperature setting
Furnace body temperature sensor
|
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
