Specialty Materials and Services

III-V Metal Materials & Metal ETCH PROCESS SERVICES

The technical staff of scientists and engineers at ULVAC Technologies, Inc. in Methuen, MA is available to help customers meet the challenges of RIE process in LED, RF Device, SIC, Noble Metal, II-V Materials, and Ferro-Electric Materials.

Visit Material Research Institute at Penn State University

NE-Series Applications

  • GaN, Sapphire
  • AlGainP
  • GaN/AlGaN,AIN,SiC
  • Ir, Pt/PZT, BST, SBTO

 

The NE system consists of a process chamber with Temperature control of chamber-wall. STAR electrode to prevent re-deposition. Precise Depth Control (EPM).

Processing Facility
4,000 Sq. Ft. Cleanroom
NLD-6000 Etch System
ENVIRO Asher 
Wet Clean Systems
SEM & Metrology Tools
100mm - 200mm wafers
Glass, Quartz and Silica Substrates

CONTACT ULVAC
for more information
ULVAC DEEP OXIDE FOUNDRY SERVICE