Specialty Materials and Services
III-V Metal Materials & Metal ETCH PROCESS SERVICES
The technical staff of scientists and engineers at ULVAC Technologies, Inc. in Methuen, MA is available to help customers meet the challenges of RIE process in LED, RF Device, SIC, Noble Metal, II-V Materials, and Ferro-Electric Materials.
- GaN, Sapphire
- Ir, Pt/PZT, BST, SBTO
The NE system consists of a process chamber with Temperature control of chamber-wall. STAR electrode to prevent re-deposition. Precise Depth Control (EPM).