Specialty Materials and Services
VACUUM GAUGE CALIBRATION
ULVAC Registered as Japan’s First JCSS Calibration Laboratory for Vacuum Gauges
August 16, 2010 ULVAC, Inc.
ULVAC, Inc. (Headquarters: Chigasaki, Kanagawa; President & CEO: Hidenori Suwa), which provides calibration services for vacuum gauges, has announced that it has been registered by the International Accreditation Japan of the National Institute of Technology and Evaluation (IA JAPAN/NITE) as a calibration laboratory of the Japan Calibration Service System (JCSS), and also that it has been accredited for compliance with Mutual Recognition Arrangements (MRA).The system demands a management system conforming to ISO/IEC 17025 (JIS Q 17025), “General requirements for the competence of testing and calibration laboratories,” the international standard which requires both quality and technical ability of testing and calibration laboratories.
Since the 1960s, vacuum gauges in Japan have been calibrated by McLeod gauges and secondary standard ionization vacuum gauges supplied from the Vacuum Society of Japan under JIS Z 8750, which is the standard for the calibration of vacuum gauges approximately 100 Pa or lower. Under this standard, ULVAC also has calibrated diaphragm gauges, Pirani gauges, hot cathode ionization gauges, and other vacuum gauges. However, the concept of uncertainty was not adopted in this standard and thus it is no longer consistent with recent quality control practices. In addition, secondary standard ionization vacuum gauges are no longer being supplied. For these reasons, it has become difficult to ensure traceability in the vacuum field.
To solve this problem, the National Metrology Institute of Japan of the Advanced Industrial Science and Technology (NMIJ/AIST) started calibration of reference gauges (pressure range: 1×10-3 to 1 Pa) under the JCSS system in 2005. Specifically, vacuum field generators (based on the static volume expansion method) and viscosity gauges (spinning rotor vacuum gauges) are being supplied as a primary vacuum standard and secondary standard gauges, respectively. However, until now no calibration laboratories had been registered under the JCSS system.
In 2009, JIS Z 8750 was fully revised to ensure consistency with ISO/TS 3567, which is the international standard for the calibration of vacuum gauges. The revised version of JIS Z 8750 requires the following: the implementation of ISO/IEC 17025 (JIS Q 17025); the use of reference vacuum gauges traceable to national or international standard; and a statement of uncertainties on calibration certificates. The technical committee for vacuum technology in the International Organization of Standardization, ISO/TC112, issued ISO/TS 27893, “Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge,”. These changes require the inclusion of a statement of uncertainties and an assurance of traceability on calibration certificates, even in the field of vacuum measurements. This means that calibration laboratories of vacuum gauges are also required to implement management systems conforming to ISO/IEC 17025 and ensure their calibration competency.
To quickly respond to these changes, ULVAC had been preparing to become a JCSS-registered laboratory since 2006 and was registered as Japan’s first JCSS-compliant calibration laboratory for vacuum gauges in June 2010. ULVAC was also accredited for its compliance with MRA. This achievement has proved that the calibration services provided by ULVAC’s Standard Calibration Group have world-class technical capabilities and quality, and as such we are allowed to issue calibration certificates with the JCSS mark.
ULVAC’s registration details are listed below.
- Registration number: JCSS 0258
- Name of laboratory : Standard Calibration Group, Quality Assurance Department, Components Division, ULVAC, Inc.
- Address: 2500 Hagisono, Chigasaki, Kanagawa, Japan
- Registered classification Pressure
- Registered measuring instruments Viscosity gauges (specified secondary reference gauges)
- Registered to all vacuum range area
- Calibration gas Nitrogen
- Best measurement capability [uncertainty] Viscosity gauge : 0.60%
- Hot cathode ionization gauge : 3.0%
- Accreditation standard ISO/IEC 17025:2005（JIS Q 17025:2005）
- Date of initial accreditation or registration for the registered classification June 3, 2010
- Calibration at a permanent facility or on-site Calibration at a permanent facility
We will expand the range of pressures for which we can supply JCSS-compliant calibration services, and shall strive to meet demands of increasing numbers of users regarding our calibration services for vacuum gauges.