SCH-135 Sputtering System for Solar Cells

   ULVAC Technologies, Inc.
   401 Griffin Brook Drive
   Methuen, MA 01844

Tel: 978-686-7550
Fax: 978-689-6300

Sputtering Systems for Solar Cells

SCH-135 System

The SCH-135 is an in-line sputtering system for deposition of TCO and contact metal films. The system is designed for high throughput and low cost and has a large install base for solar cell production.

Features

Available for large substrate sizes (1100x1400mm).
High throughput.
Easy maintenance.
Low system and operating cost.

For more information
Please Email Us
TEL : 978-686-7550/ FAX : 978-689-6300

^top