ITO Targets
ULVAC provides high quality targets contributes to high functional films for Flat Panel Displays (FPD). These targets features include stable and enhanced discharge during deposition through refinement and high dispersion of SnO2. Good roughness of target surface, High stability of film resistance after deposition, low particle count.
FPD manufacturing equipment sizes are becoming larger and larger so sputtering target dimensions are also increasing. To improve both production equipment and QA equipment, ULVAC has installed large ultrasonic test equipment to make meticulous defect inspections of materials and bonding inspections. Using this equipment has helped ULVAC drastically cut down on arcing during sputtering and deliver high quality targets.
ULVAC Sputtering Targets Cataloge
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